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This dissertation by Smita G. Rao investigates alloy-based thin films synthesized through magnetron sputtering, focusing on the CrFeCoNi nitrogen-containing system. Utilizing both theoretical and experimental methods, the study explores phase formation in this system, particularly the stabilization of different crystal structures depending on nitrogen content and growth conditions. The research highlights the importance of phase diagrams for developing complex structures for applications such as irradiation resistance and epitaxial films. The work underscores the role of kinetic energy in film growth, provided by ion bombardment, to improve epitaxy quality.

Magnetron sputtering. --- Alloys. --- Magnetron sputtering --- Alloys

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This thesis by Marcus Lorentzon focuses on the development and enhancement of hard ceramic coatings using ion-assisted reactive magnetron sputtering. It explores the mechanical properties, growth mechanisms, and structures of transition metal nitrides (TiN, ZrN, HfN) and their alloys (TiAlN, ZrAlN, HfAlN). The research aims to improve the hardness and toughness of these coatings for protective applications in the metal processing industry. The study includes the creation of multilayer structures and single-crystal films, investigating their behavior under various temperature conditions. The intended audience includes materials scientists, engineers, and researchers in the field of thin film physics and advanced materials.

Magnetron sputtering. --- Coatings. --- Magnetron sputtering --- Coatings

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This dissertation by Asim Aijaz explores the synthesis of carbon-based and metal-oxide thin films using high power impulse magnetron sputtering (HiPIMS). The work is divided into two parts, focusing on the deposition of carbon-based and metal-oxide thin films. For carbon-based films, strategies were developed to enhance the degree of carbon ionization and deposition rates. This includes using a higher ionization potential buffer gas and coupling HiPIMS with direct current magnetron sputtering (DCMS). For metal-oxide films, the study investigates reactive HiPIMS discharges for systems like Ti-O and Al-O, and their influence on film properties such as phase composition and optical characteristics. The dissertation targets researchers and professionals in the fields of material science and plasma physics, providing insights into advanced film deposition techniques and their applications.

Magnetron sputtering. --- Thin films.

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This licentiate thesis by Babak Bakhit explores the growth and properties of transition metal diboride thin films using magnetron sputtering with metal-ion irradiation. The research focuses on controlling the crystalline phase and stoichiometry of these materials, which are known for their high melting temperatures and suitability in extreme thermal and chemical environments. The thesis highlights the potential applications of transition metal diborides in aerospace, nuclear reactors, and advanced electronics due to their unique combination of hardness, thermal conductivity, and electrical properties. The work is supported by various research grants and contributes to the field of materials science by addressing challenges in film composition and proposing strategies to enhance both hardness and toughness of the films. The intended audience includes researchers and professionals in materials science and engineering.

Thin films. --- Magnetron sputtering.

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This dissertation by Rommel Paulo B. Viloan explores innovative methods to enhance ion energy in thin film deposition using high-power impulse magnetron sputtering (HiPIMS). The study investigates strategies to increase ion energies without substrate bias, focusing on bipolar HiPIMS to optimize ion acceleration. The work examines the impact on crystal growth and film properties, such as stress and hardness, specifically in TiN films. The research aims to provide solutions for industrial applications where substrate biasing is challenging. Intended for a scientific audience, it contributes to advancements in thin film technology and material science.

Magnetron sputtering. --- Thin films.