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Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of components and inputs for a manufacturing process to assure they are within specification requirements. It can also be extended to indicate the performance measurement of manufacturing equipment. This Special Issue covers papers revealing novel measurement methodologies and instrumentations for manufacturing metrology from the conventional industry to the frontier of the advanced hi-tech industry. Twenty-five papers are included in this Special Issue. These published papers can be categorized into four main groups, as follows: Length measurement: covering new designs, from micro/nanogap measurement with laser triangulation sensors and laser interferometers to very-long-distance, newly developed mode-locked femtosecond lasers. Surface profile and form measurements: covering technologies with new confocal sensors and imagine sensors: in situ and on-machine measurements. Angle measurements: these include a new 2D precision level design, a review of angle measurement with mode-locked femtosecond lasers, and multi-axis machine tool squareness measurement. Other laboratory systems: these include a water cooling temperature control system and a computer-aided inspection framework for CMM performance evaluation.

Technology: general issues --- History of engineering & technology --- white light interference --- laser interference --- surface positioning --- end-plate surface distance measurement --- spherical diamond wheel --- diamond roller --- form truing --- in-situ measurements --- topography measurement --- differential measurement system --- modular design --- confocal sensor --- film interferometry --- over-constrained mechanism --- geometric deviations --- multi-tasking machine tools --- identification method --- squareness of translational axes --- metrology --- step gauge --- length calibration --- multi-path laser synthesis technology --- measurement mechanism --- machine tool --- surface shape contour --- on-site measurement --- positional relation --- scanless 3D imaging --- compressed sensing --- depth detection --- single-pixel detector --- blade tip timing --- circumferential Fourier fit --- synchronous vibration --- optical angle sensor --- mode-locked femtosecond laser --- optical frequency comb --- laser autocollimation --- diffraction grating --- absolute angle measurement --- nonlinear optics --- second harmonic generation --- aeroengine blade --- blade twist --- measurement and evaluation --- a priori planning --- geometric analysis --- automated optical inspection --- precision measurement --- circular contour --- edge detection --- measurement system analysis --- coordinate measuring machine --- reproducibility --- GD&amp --- T --- quality --- measurement uncertainty --- precision metrology --- form measurement --- stitching linear-scan method --- roundness measurement --- Monte Carlo method --- single point diamond tool --- cutting edge radius --- reversal method --- nanoindentation system --- elastic recovery --- surface charge distribution --- point probing characteristics --- spherical scattering electrical field probe --- miniature internal structures --- high aspect ratios --- circulating cooling water --- dynamic thermal filtering --- precision manufacturing --- quick response --- temperature stability --- thermal management --- dual-axis level --- light refraction --- light transmission --- angle measurement --- differential Fabry-Pérot interferometer --- homodyne interferometer --- nonlinearity error --- linear displacement --- chromatic confocal probe --- femtosecond laser --- off-axis differential method --- tracking local minimum method --- laser triangulation displacement sensor (LTDS) --- dispensing robot --- location system --- actual laser imaging waveform --- centroid difference --- repeatability accuracy --- dynamic response speed --- absolute distance measurement --- system error correction --- surface texture measurement --- confocal sensing --- surface form tracing --- 3D reconstruction --- roughness --- in-process --- metrology for machining --- optical coherence tomography --- wafer die --- defect detection --- generative adversarial network (GAN) --- you only look once version 3 (YOLOv3) --- pad dressing --- dynamic measurement --- CMP --- pad uniformity --- pad lifetime --- white light interference --- laser interference --- surface positioning --- end-plate surface distance measurement --- spherical diamond wheel --- diamond roller --- form truing --- in-situ measurements --- topography measurement --- differential measurement system --- modular design --- confocal sensor --- film interferometry --- over-constrained mechanism --- geometric deviations --- multi-tasking machine tools --- identification method --- squareness of translational axes --- metrology --- step gauge --- length calibration --- multi-path laser synthesis technology --- measurement mechanism --- machine tool --- surface shape contour --- on-site measurement --- positional relation --- scanless 3D imaging --- compressed sensing --- depth detection --- single-pixel detector --- blade tip timing --- circumferential Fourier fit --- synchronous vibration --- optical angle sensor --- mode-locked femtosecond laser --- optical frequency comb --- laser autocollimation --- diffraction grating --- absolute angle measurement --- nonlinear optics --- second harmonic generation --- aeroengine blade --- blade twist --- measurement and evaluation --- a priori planning --- geometric analysis --- automated optical inspection --- precision measurement --- circular contour --- edge detection --- measurement system analysis --- coordinate measuring machine --- reproducibility --- GD&amp --- T --- quality --- measurement uncertainty --- precision metrology --- form measurement --- stitching linear-scan method --- roundness measurement --- Monte Carlo method --- single point diamond tool --- cutting edge radius --- reversal method --- nanoindentation system --- elastic recovery --- surface charge distribution --- point probing characteristics --- spherical scattering electrical field probe --- miniature internal structures --- high aspect ratios --- circulating cooling water --- dynamic thermal filtering --- precision manufacturing --- quick response --- temperature stability --- thermal management --- dual-axis level --- light refraction --- light transmission --- angle measurement --- differential Fabry-Pérot interferometer --- homodyne interferometer --- nonlinearity error --- linear displacement --- chromatic confocal probe --- femtosecond laser --- off-axis differential method --- tracking local minimum method --- laser triangulation displacement sensor (LTDS) --- dispensing robot --- location system --- actual laser imaging waveform --- centroid difference --- repeatability accuracy --- dynamic response speed --- absolute distance measurement --- system error correction --- surface texture measurement --- confocal sensing --- surface form tracing --- 3D reconstruction --- roughness --- in-process --- metrology for machining --- optical coherence tomography --- wafer die --- defect detection --- generative adversarial network (GAN) --- you only look once version 3 (YOLOv3) --- pad dressing --- dynamic measurement --- CMP --- pad uniformity --- pad lifetime

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of components and inputs for a manufacturing process to assure they are within specification requirements. It can also be extended to indicate the performance measurement of manufacturing equipment. This Special Issue covers papers revealing novel measurement methodologies and instrumentations for manufacturing metrology from the conventional industry to the frontier of the advanced hi-tech industry. Twenty-five papers are included in this Special Issue. These published papers can be categorized into four main groups, as follows: Length measurement: covering new designs, from micro/nanogap measurement with laser triangulation sensors and laser interferometers to very-long-distance, newly developed mode-locked femtosecond lasers. Surface profile and form measurements: covering technologies with new confocal sensors and imagine sensors: in situ and on-machine measurements. Angle measurements: these include a new 2D precision level design, a review of angle measurement with mode-locked femtosecond lasers, and multi-axis machine tool squareness measurement. Other laboratory systems: these include a water cooling temperature control system and a computer-aided inspection framework for CMM performance evaluation.

white light interference --- laser interference --- surface positioning --- end-plate surface distance measurement --- spherical diamond wheel --- diamond roller --- form truing --- in-situ measurements --- topography measurement --- differential measurement system --- modular design --- confocal sensor --- film interferometry --- over-constrained mechanism --- geometric deviations --- multi-tasking machine tools --- identification method --- squareness of translational axes --- metrology --- step gauge --- length calibration --- multi-path laser synthesis technology --- measurement mechanism --- machine tool --- surface shape contour --- on-site measurement --- positional relation --- scanless 3D imaging --- compressed sensing --- depth detection --- single-pixel detector --- blade tip timing --- circumferential Fourier fit --- synchronous vibration --- optical angle sensor --- mode-locked femtosecond laser --- optical frequency comb --- laser autocollimation --- diffraction grating --- absolute angle measurement --- nonlinear optics --- second harmonic generation --- aeroengine blade --- blade twist --- measurement and evaluation --- a priori planning --- geometric analysis --- automated optical inspection --- precision measurement --- circular contour --- edge detection --- measurement system analysis --- coordinate measuring machine --- reproducibility --- GD&amp --- T --- quality --- measurement uncertainty --- precision metrology --- form measurement --- stitching linear-scan method --- roundness measurement --- Monte Carlo method --- single point diamond tool --- cutting edge radius --- reversal method --- nanoindentation system --- elastic recovery --- surface charge distribution --- point probing characteristics --- spherical scattering electrical field probe --- miniature internal structures --- high aspect ratios --- circulating cooling water --- dynamic thermal filtering --- precision manufacturing --- quick response --- temperature stability --- thermal management --- dual-axis level --- light refraction --- light transmission --- angle measurement --- differential Fabry–Pérot interferometer --- homodyne interferometer --- nonlinearity error --- linear displacement --- chromatic confocal probe --- femtosecond laser --- off-axis differential method --- tracking local minimum method --- laser triangulation displacement sensor (LTDS) --- dispensing robot --- location system --- actual laser imaging waveform --- centroid difference --- repeatability accuracy --- dynamic response speed --- absolute distance measurement --- system error correction --- surface texture measurement --- confocal sensing --- surface form tracing --- 3D reconstruction --- roughness --- in-process --- metrology for machining --- optical coherence tomography --- wafer die --- defect detection --- generative adversarial network (GAN) --- you only look once version 3 (YOLOv3) --- pad dressing --- dynamic measurement --- CMP --- pad uniformity --- pad lifetime --- n/a --- differential Fabry-Pérot interferometer