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2021 (3)

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Book
Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
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Year: 2021 Publisher: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute

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Abstract

Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.


Book
Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
Author:
Year: 2021 Publisher: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute

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Abstract

Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.


Book
Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
Author:
Year: 2021 Publisher: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute

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Abstract

Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.

Keywords

History of engineering & technology --- porous silicon --- Pd nanoparticles-assisted chemical etching --- etching rate --- ethanol electrooxidation --- X-ray diffractive optics --- zone plate --- high aspect ratio nanostructures --- metal-assisted chemical etching --- electroless deposition --- Al2O3 nanotube --- ultra-high aspect ratio --- gold (Au) metal assisted chemical etching --- atomic layer deposition --- anisotropic dry etching --- silicon cones --- metal assisted chemical etching --- transversal pores --- antireflection --- black GaAs --- photon recycling --- X-ray grating interferometry --- catalyst --- silicon --- gold electroplating --- magnetically guided metal-assisted chemical etching --- bulk Si etching --- curved Si structure --- catalyst encapsulation --- porous silicon --- Pd nanoparticles-assisted chemical etching --- etching rate --- ethanol electrooxidation --- X-ray diffractive optics --- zone plate --- high aspect ratio nanostructures --- metal-assisted chemical etching --- electroless deposition --- Al2O3 nanotube --- ultra-high aspect ratio --- gold (Au) metal assisted chemical etching --- atomic layer deposition --- anisotropic dry etching --- silicon cones --- metal assisted chemical etching --- transversal pores --- antireflection --- black GaAs --- photon recycling --- X-ray grating interferometry --- catalyst --- silicon --- gold electroplating --- magnetically guided metal-assisted chemical etching --- bulk Si etching --- curved Si structure --- catalyst encapsulation


Book
Silica and Silicon Based Nanostructures
Author:
Year: 2022 Publisher: Basel : MDPI - Multidisciplinary Digital Publishing Institute,

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Abstract

Silica and silicon-based nanostructures are now well-understood materials for which the technologies are mature. The most obvious applications, such as electronic devices, have been widely explored over the last two decades. The aim of this Special Issue is to bring together the state of the art in the field and to enable the emergence of new ideas and concepts for silicon and silica-based nanostructures.


Book
Silica and Silicon Based Nanostructures
Author:
Year: 2022 Publisher: Basel : MDPI - Multidisciplinary Digital Publishing Institute,

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Abstract

Silica and silicon-based nanostructures are now well-understood materials for which the technologies are mature. The most obvious applications, such as electronic devices, have been widely explored over the last two decades. The aim of this Special Issue is to bring together the state of the art in the field and to enable the emergence of new ideas and concepts for silicon and silica-based nanostructures.


Book
Silica and Silicon Based Nanostructures
Author:
Year: 2022 Publisher: Basel : MDPI - Multidisciplinary Digital Publishing Institute,

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Abstract

Silica and silicon-based nanostructures are now well-understood materials for which the technologies are mature. The most obvious applications, such as electronic devices, have been widely explored over the last two decades. The aim of this Special Issue is to bring together the state of the art in the field and to enable the emergence of new ideas and concepts for silicon and silica-based nanostructures.

Keywords

Research. --- Physics. --- maize --- NPK --- SiO2-NPs --- productivity --- fertilizer --- mineral --- weevils --- LC50 --- toxicity --- mesoporous silica --- nanomaterials --- desulfurization --- fuel --- JP-8 --- black silicon --- light absorption enhanced --- micro-nano manufacturing --- nanometer surface --- nano-silica --- tricalcium aluminate --- pozzolanic reaction --- C-A-S-H gel --- silicon nanoparticles --- silicon nanowires --- synthesis --- high energy density --- lithium-ion batteries --- high-capacity anode --- VLS --- laser pyrolysis --- size effect --- shape effect --- biomass rice husk --- silicon --- nanocrystals --- luminescence --- high porosity --- pH sensor --- temperature sensor --- dual sensor --- metal-assisted chemical etching --- Si nanostructures --- high aspect ratio --- zone plate --- silicon nanowire --- nanowire array --- silicon anode --- n-type silicon anode --- Li-ion battery --- nanowires --- nanonets --- transistor --- integration process --- maize --- NPK --- SiO2-NPs --- productivity --- fertilizer --- mineral --- weevils --- LC50 --- toxicity --- mesoporous silica --- nanomaterials --- desulfurization --- fuel --- JP-8 --- black silicon --- light absorption enhanced --- micro-nano manufacturing --- nanometer surface --- nano-silica --- tricalcium aluminate --- pozzolanic reaction --- C-A-S-H gel --- silicon nanoparticles --- silicon nanowires --- synthesis --- high energy density --- lithium-ion batteries --- high-capacity anode --- VLS --- laser pyrolysis --- size effect --- shape effect --- biomass rice husk --- silicon --- nanocrystals --- luminescence --- high porosity --- pH sensor --- temperature sensor --- dual sensor --- metal-assisted chemical etching --- Si nanostructures --- high aspect ratio --- zone plate --- silicon nanowire --- nanowire array --- silicon anode --- n-type silicon anode --- Li-ion battery --- nanowires --- nanonets --- transistor --- integration process

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