Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

Anomaly. --- Magnetron planes.

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

This licentiate thesis by Faezeh Alijan Farzad focuses on the epitaxial growth of oxide and nitride thin films, particularly NiO and CrN, using magnetron sputtering. The study investigates the structural and optical properties of these films on different substrates, such as Si(100) and sapphire. The research aims to advance the understanding of epitaxial growth, film orientation, and their respective properties, which are crucial for applications in electronic devices, sensors, and batteries. The intended audience includes researchers and professionals in materials science and thin film physics.

Epitaxy. --- Magnetron sputtering.

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

This dissertation by Asim Aijaz explores the synthesis of carbon-based and metal-oxide thin films using high power impulse magnetron sputtering (HiPIMS). The work is divided into two parts, focusing on the deposition of carbon-based and metal-oxide thin films. For carbon-based films, strategies were developed to enhance the degree of carbon ionization and deposition rates. This includes using a higher ionization potential buffer gas and coupling HiPIMS with direct current magnetron sputtering (DCMS). For metal-oxide films, the study investigates reactive HiPIMS discharges for systems like Ti-O and Al-O, and their influence on film properties such as phase composition and optical characteristics. The dissertation targets researchers and professionals in the fields of material science and plasma physics, providing insights into advanced film deposition techniques and their applications.

Magnetron sputtering. --- Thin films.

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

This thesis by Rui Shu examines the development and properties of high entropy ceramic films, specifically (TiNbZrTa)Nx, using reactive magnetron sputtering. The research focuses on the effects of deposition parameters like substrate temperature and nitrogen flow ratio on the microstructure and mechanical, electrical, and corrosion-resistant properties of these films. Key findings include the correlation between nitrogen content and corrosion resistance, as well as the structural transitions observed at various deposition temperatures. The study aims to advance the understanding of protective nitride films, with potential applications in corrosion-resistant coatings for fuel cells and batteries. The work is a part of doctoral studies in Materials Science at Linköping University and supported by various academic and industrial collaborations.

Ceramics. --- Magnetron sputtering.

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

This dissertation by Rui Shu investigates the process-structure-property relationships of refractory high-entropy alloys and nitrides, primarily synthesized through magnetron sputtering. The research focuses on understanding the effects of substrate temperature and nitrogen flow on the mechanical, electrical, and corrosion-resistant properties of TiZrNbTaNx nitrides. The study also explores the impact of ion energy and metal substitution on the evolution of high-entropy nitride films. Furthermore, the dissertation examines structural stability and elemental segregation under irradiation, as well as the superconducting properties of these materials. The work is intended for professionals and researchers in materials science, particularly those interested in the development and application of high-entropy materials for advanced coatings and superconductors.

Nitrides. --- Magnetron sputtering.