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Book

2016 21st International Conference on Ion Implantation Technology (IIT)
Author: Institute of Electrical and Electronics Engineers
ISBN: 1509020241 150902025X Year: 2016 Publisher: Piscataway, NJ : IEEE,

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Annotation The conference will cover topics on ion implantation technology and thermal processing for semiconductor devices and materials including junction, contact, material modification, process modeling and metrology methods.

Keywords
Ion implantation

Book

Papers from the fourth international plasma-based ion implantation workshop.
Authors: Mantese, Joseph V. --- Speck, Carlton E.
ISBN: 1563968843 Year: 1999 Publisher: Boston American vacuum society

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Ion implantation

Book

Ion implantation : science and technology
Author: Ziegler, J. F.
ISBN: 9780965420747 Year: 2008 Publisher: Chester Ion implantation technology

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Ion implantation

Book

Ion Implantation Technology (IIT), 2014 20th International Conference on
Author: Institute of Electrical and Electronics Engineers (IEEE)
ISBN: 1479952133 1479952125 Year: 2014 Publisher: Piscataway, New Jersey : Institute of Electrical and Electronics Engineers (IEEE),

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Annotation Ion Implantation Technology and Thermal Processing for Semiconductor Devices and Materials.

Keywords
Ion implantation --- Semiconductors

Book

Studie van de ionenimplantatie in ferromagnetica
Author: Pattyn, Hugo
Year: 1977 Publisher: Brussel : Paleis der Academiën,

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Ferromagnetic materials. --- Ion implantation.

Book

Ion beams : with applications to ion implantation
Authors: Wilson, Robert G. --- Brewer, George R.
ISBN: 0882758993 Year: 1979 Publisher: Malabar (Fla.) : Krieger,

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Ion implantation. --- Microelectronics. --- Semiconductors.

Book

Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984
Authors: Ziegler, James F. --- Brown, R. L. --- International conference on ion implantation equipment and techniques (5th : 1984 : Jeffersonville, Vt.)
Year: 1985 Publisher: Amsterdam: North-Holland,

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Ion implantation --- Semiconductor doping

Tables of ion implantation spatial distributions
Authors: Amoretty, S. J. --- Burenkov, A. F. --- Komarov, F. F. --- Kumakhov, M. A.
ISBN: 2881240712 Year: 1986 Publisher: New York (N.Y.) Gordon and Breach

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Ion implantation --- Tables

Book

Papers from the first international workshop on plasma-based ion implantation
Authors: Conrad, John R. --- Sridharan, Kumar
ISBN: 1563963442 Year: 1994 Publisher: New York (N.Y.): American institute of physics

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Ion implantation --- Congresses

Book

European conference on ion implantation : Reading September 7th-9th 1970
ISBN: 0901223069 Year: 1970 Publisher: Stevenage Peregrinus

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Ion implantation --- Semiconductors --- Congresses

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