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Book
MEMS/NEMS Sensors: Fabrication and Application
Authors: ---
ISBN: 303921635X 3039216341 Year: 2019 Publisher: MDPI - Multidisciplinary Digital Publishing Institute

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Abstract

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions.

Keywords

vibrating ring gyroscope --- n/a --- tunnel magnetoresistive effect --- optical sensor --- micro-NIR spectrometer --- pulse inertia force --- gas sensor --- wet etching --- oil detection --- glass welding --- spring design --- power consumption --- MEMS (micro-electro-mechanical system) --- back cavity --- deflection position detector --- magnetic --- MEMS --- single-layer SiO2 --- frequency tuning --- threshold accuracy --- suspended micro hotplate --- AlGaN/GaN circular HFETs --- quadrature modulation signal --- inertial switch --- nanoparticle sensor --- low noise --- photonic crystal nanobeam cavity --- floating slug --- infrared image --- backstepping approach --- microdroplet --- acceleration switch --- microgyroscope --- temperature uniformity --- methane --- microfluidic --- accelerometer design --- photonic crystal cavity --- anisotropy --- resonant frequency --- dual-mass MEMS gyroscope --- analytical model --- single crystal silicon --- temperature sensor --- micro fluidic --- refractive index sensor --- microwave measurement --- low zero-g offset --- femtosecond laser --- micropellistor --- rapid fabrication --- accelerometer --- tracking performance --- GaN diaphragm --- microactuator --- resistance parameter --- optomechanical sensor --- scanning grating mirror --- GaAs MMIC --- adaptive control --- frequency split --- frequency mismatch --- electrostatic force feedback --- thermoelectric power sensor --- squeeze-film damping --- silicon --- wideband --- Accelerometer readout --- bonding strength --- high temperature pressure sensors --- 3D simulation --- level-set method --- tetramethylammonium hydroxide (TMAH)


Book
Optimization of Motion Planning and Control for Automatic Machines, Robots and Multibody Systems
Authors: ---
Year: 2020 Publisher: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute

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Abstract

The optimization of motion and trajectory planning is an effective and usually costless approach to improving the performance of robots, mechatronic systems, automatic machines and multibody systems. Indeed, wise planning increases precision and machine productivity, while reducing vibrations, motion time, actuation effort and energy consumption. On the other hand, the availability of optimized methods for motion planning allows for a cheaper and lighter system construction. The issue of motion planning is also tightly linked with the synthesis of high-performance feedback and feedforward control schemes, which can either enhance the effectiveness of motion planning or compensate for its gaps. To collect and disseminate a meaningful collection of these applications, this book proposes 15 novel research studies that cover different sub-areas, in the framework of motion planning and control.

Keywords

History of engineering & technology --- humanoid robot --- walk fast --- rotational slip --- ZMP --- gait planning --- quadruped robot --- whole robot control --- location trajectory --- dynamic gait --- fin stabilizer --- command-filtered backstepping --- sliding mode control --- prescribed performance --- disturbance observer --- OES --- inertial stability accuracy --- low-speed performance --- speed observation --- disturbance observation --- state-augmented Kalman filter --- composed control scheme --- fractional calculus --- FOPD controller --- underwater vehicle --- motion control --- modal analysis --- flexible multibody systems --- linearized models --- six-legged robot --- whole-body motion planning --- rugged terrain --- support --- swing --- gesture-based teleoperation --- robotic assembly --- force feedback --- compliant robot motion --- pickup manipulator --- adaptive genetic algorithm --- trajectory optimization --- improved artificial potential field method --- obstacle avoidance planning --- robust estimation --- dynamic model --- unknown but bounded noise --- extended set-membership filter --- dynamic balancing --- shaking force balancing --- acceleration control of the center of mass --- fully Cartesian coordinates --- natural coordinates --- parallel manipulators --- passive model --- biped walking --- Impact and contact --- friction force --- dissipative force --- energy efficiency --- robot --- motion design --- functional redundancy --- UR5 --- hybrid navigation system --- weighted-sum model --- a heuristic algorithm --- piecewise cubic Bézier curve --- mobile robot --- n/a


Book
Optimization of Motion Planning and Control for Automatic Machines, Robots and Multibody Systems
Authors: ---
Year: 2020 Publisher: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute

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Abstract

The optimization of motion and trajectory planning is an effective and usually costless approach to improving the performance of robots, mechatronic systems, automatic machines and multibody systems. Indeed, wise planning increases precision and machine productivity, while reducing vibrations, motion time, actuation effort and energy consumption. On the other hand, the availability of optimized methods for motion planning allows for a cheaper and lighter system construction. The issue of motion planning is also tightly linked with the synthesis of high-performance feedback and feedforward control schemes, which can either enhance the effectiveness of motion planning or compensate for its gaps. To collect and disseminate a meaningful collection of these applications, this book proposes 15 novel research studies that cover different sub-areas, in the framework of motion planning and control.

Keywords

humanoid robot --- walk fast --- rotational slip --- ZMP --- gait planning --- quadruped robot --- whole robot control --- location trajectory --- dynamic gait --- fin stabilizer --- command-filtered backstepping --- sliding mode control --- prescribed performance --- disturbance observer --- OES --- inertial stability accuracy --- low-speed performance --- speed observation --- disturbance observation --- state-augmented Kalman filter --- composed control scheme --- fractional calculus --- FOPD controller --- underwater vehicle --- motion control --- modal analysis --- flexible multibody systems --- linearized models --- six-legged robot --- whole-body motion planning --- rugged terrain --- support --- swing --- gesture-based teleoperation --- robotic assembly --- force feedback --- compliant robot motion --- pickup manipulator --- adaptive genetic algorithm --- trajectory optimization --- improved artificial potential field method --- obstacle avoidance planning --- robust estimation --- dynamic model --- unknown but bounded noise --- extended set-membership filter --- dynamic balancing --- shaking force balancing --- acceleration control of the center of mass --- fully Cartesian coordinates --- natural coordinates --- parallel manipulators --- passive model --- biped walking --- Impact and contact --- friction force --- dissipative force --- energy efficiency --- robot --- motion design --- functional redundancy --- UR5 --- hybrid navigation system --- weighted-sum model --- a heuristic algorithm --- piecewise cubic Bézier curve --- mobile robot --- n/a


Book
Optimization of Motion Planning and Control for Automatic Machines, Robots and Multibody Systems
Authors: ---
Year: 2020 Publisher: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute

Loading...
Export citation

Choose an application

Bookmark

Abstract

The optimization of motion and trajectory planning is an effective and usually costless approach to improving the performance of robots, mechatronic systems, automatic machines and multibody systems. Indeed, wise planning increases precision and machine productivity, while reducing vibrations, motion time, actuation effort and energy consumption. On the other hand, the availability of optimized methods for motion planning allows for a cheaper and lighter system construction. The issue of motion planning is also tightly linked with the synthesis of high-performance feedback and feedforward control schemes, which can either enhance the effectiveness of motion planning or compensate for its gaps. To collect and disseminate a meaningful collection of these applications, this book proposes 15 novel research studies that cover different sub-areas, in the framework of motion planning and control.

Keywords

History of engineering & technology --- humanoid robot --- walk fast --- rotational slip --- ZMP --- gait planning --- quadruped robot --- whole robot control --- location trajectory --- dynamic gait --- fin stabilizer --- command-filtered backstepping --- sliding mode control --- prescribed performance --- disturbance observer --- OES --- inertial stability accuracy --- low-speed performance --- speed observation --- disturbance observation --- state-augmented Kalman filter --- composed control scheme --- fractional calculus --- FOPD controller --- underwater vehicle --- motion control --- modal analysis --- flexible multibody systems --- linearized models --- six-legged robot --- whole-body motion planning --- rugged terrain --- support --- swing --- gesture-based teleoperation --- robotic assembly --- force feedback --- compliant robot motion --- pickup manipulator --- adaptive genetic algorithm --- trajectory optimization --- improved artificial potential field method --- obstacle avoidance planning --- robust estimation --- dynamic model --- unknown but bounded noise --- extended set-membership filter --- dynamic balancing --- shaking force balancing --- acceleration control of the center of mass --- fully Cartesian coordinates --- natural coordinates --- parallel manipulators --- passive model --- biped walking --- Impact and contact --- friction force --- dissipative force --- energy efficiency --- robot --- motion design --- functional redundancy --- UR5 --- hybrid navigation system --- weighted-sum model --- a heuristic algorithm --- piecewise cubic Bézier curve --- mobile robot

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