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MEMS devices are found in many of today’s electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc. Increasingly, the reduction in dimensions has led to nanometer-scale devices, called NEMS. The plethora of applications on the commercial market speaks for itself, and especially for the highly precise manufacturing of silicon-based MEMS and NEMS. While this is a tremendous achievement, silicon as a material has some drawbacks, mainly in the area of mechanical fatigue and thermal properties. Silicon carbide (SiC), a well-known wide-bandgap semiconductor whose adoption in commercial products is experiening exponential growth, especially in the power electronics arena. While SiC MEMS have been around for decades, in this Special Issue we seek to capture both an overview of the devices that have been demonstrated to date, as well as bring new technologies and progress in the MEMS processing area to the forefront. Thus, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of SiC MEMS and NEMS based on all kinds of actuation mechanisms; and (2) new developments in applying SiC MEMS and NEMS in consumer electronics, optical communications, industry, medicine, agriculture, space, and defense.

Engineering --- History. --- high-power impulse magnetron sputtering (HiPIMS) --- silicon carbide --- aluminum nitride --- thin film --- Rutherford backscattering spectrometry (RBS) --- grazing incidence X-ray diffraction (GIXRD) --- Raman spectroscopy --- 6H-SiC --- indentation --- deformation --- material removal mechanisms --- critical load --- 4H-SiC --- critical depth of cut --- Berkovich indenter --- cleavage strength --- nanoscratching --- power electronics --- high-temperature converters --- MEMS devices --- SiC power electronic devices --- neural interface --- neural probe --- neural implant --- microelectrode array --- MEA --- SiC --- 3C-SiC --- doped SiC --- n-type --- p-type --- amorphous SiC --- epitaxial growth --- electrochemical characterization --- MESFET --- simulation --- PAE --- bulk micromachining --- electrochemical etching --- circular membrane --- bulge test --- vibrometry --- mechanical properties --- Young’s modulus --- residual stress --- FEM --- semiconductor radiation detector --- microstrip detector --- power module --- negative gate-source voltage spike --- 4H-SiC, epitaxial layer --- Schottky barrier --- radiation detector --- point defects --- deep level transient spectroscopy (DLTS) --- thermally stimulated current spectroscopy (TSC) --- electron beam induced current spectroscopy (EBIC) --- pulse height spectroscopy (PHS) --- n/a --- Young's modulus

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This volume deals with novel high-quality research results of a wide class of mathematical models with applications in engineering, nature, and social sciences. Analytical and numeric, deterministic and uncertain dimensions are treated. Complex and multidisciplinary models are treated, including novel techniques of obtaining observation data and pattern recognition. Among the examples of treated problems, we encounter problems in engineering, social sciences, physics, biology, and health sciences. The novelty arises with respect to the mathematical treatment of the problem. Mathematical models are built, some of them under a deterministic approach, and other ones taking into account the uncertainty of the data, deriving random models. Several resulting mathematical representations of the models are shown as equations and systems of equations of different types: difference equations, ordinary differential equations, partial differential equations, integral equations, and algebraic equations. Across the chapters of the book, a wide class of approaches can be found to solve the displayed mathematical models, from analytical to numeric techniques, such as finite difference schemes, finite volume methods, iteration schemes, and numerical integration methods.

Research & information: general --- Mathematics & science --- mathematical modeling --- infiltration well --- differential equations --- porous medium --- fractal conductivity model --- incomplete rankings --- Kendall’s tau --- permutation graph --- competitive balance --- Spotify --- collocation --- volterra integral equation --- highly oscillatory --- convergence --- areal porosity --- volumetric porosity --- fractal area-volume relationship --- tortuosity factor --- joint probability --- corrugated box printing machine --- modified Delphi method --- analytic network process (ANP) --- supplier --- nonlinear system --- iterative method --- divided difference operator --- stability --- parameter plane --- dynamical plane --- random hyperbolic model --- random laplace transform --- numerical integration --- monte carlo method --- numerical simulation --- talbot algorithm --- stochastic perturbations --- random nonlinear oscillator --- maximum entropy principle --- probability density function --- stationary Gaussian noise --- random mean square parabolic model --- finite degree of randomness --- random finite difference scheme --- relativistic harmonic oscillator --- kinematics of a particle --- special relativity --- nonlinear problems in mechanics --- equations of motion in gravitational theory --- virus propagation --- stochastic modeling --- Gillespie algorithm --- conservative formulation --- multidimensional fragmentation equation --- weight functions --- finite volume scheme --- contamination plume --- advection-diffusion --- universal curves --- Dirichlet-to-Neumann map --- Schrödinger operator --- contagion effect --- difference equation --- elections --- labor condition --- mathematical compartmental discrete model --- political corruption --- revolving doors --- sensitivity analysis --- simulation --- numerical methods --- integro-interpolation method --- splitting method --- convergence of models --- standard deviation of the error --- diabetic retinopathy --- ocular fundus --- laser coagulation --- optical coherence tomography --- image processing --- segmentation --- safe treatment --- Hermite interpolation --- nodal systems --- unit circle --- circular membrane --- fluid-structure interaction --- differential-integral equations --- power series method --- closed-form solution --- time series model --- wavelet transform --- ARIMA model --- neural network NARX --- ionospheric parameters --- courtyard --- climate change --- microclimate --- Support Vector Regression (SVR) --- machine learning --- matrix functions --- matrix hyperbolic tangent --- matrix exponential --- Taylor series --- matrix polynomial evaluation --- n/a --- Kendall's tau --- Schrödinger operator

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

This volume deals with novel high-quality research results of a wide class of mathematical models with applications in engineering, nature, and social sciences. Analytical and numeric, deterministic and uncertain dimensions are treated. Complex and multidisciplinary models are treated, including novel techniques of obtaining observation data and pattern recognition. Among the examples of treated problems, we encounter problems in engineering, social sciences, physics, biology, and health sciences. The novelty arises with respect to the mathematical treatment of the problem. Mathematical models are built, some of them under a deterministic approach, and other ones taking into account the uncertainty of the data, deriving random models. Several resulting mathematical representations of the models are shown as equations and systems of equations of different types: difference equations, ordinary differential equations, partial differential equations, integral equations, and algebraic equations. Across the chapters of the book, a wide class of approaches can be found to solve the displayed mathematical models, from analytical to numeric techniques, such as finite difference schemes, finite volume methods, iteration schemes, and numerical integration methods.

Research & information: general --- Mathematics & science --- mathematical modeling --- infiltration well --- differential equations --- porous medium --- fractal conductivity model --- incomplete rankings --- Kendall's tau --- permutation graph --- competitive balance --- Spotify --- collocation --- volterra integral equation --- highly oscillatory --- convergence --- areal porosity --- volumetric porosity --- fractal area-volume relationship --- tortuosity factor --- joint probability --- corrugated box printing machine --- modified Delphi method --- analytic network process (ANP) --- supplier --- nonlinear system --- iterative method --- divided difference operator --- stability --- parameter plane --- dynamical plane --- random hyperbolic model --- random laplace transform --- numerical integration --- monte carlo method --- numerical simulation --- talbot algorithm --- stochastic perturbations --- random nonlinear oscillator --- maximum entropy principle --- probability density function --- stationary Gaussian noise --- random mean square parabolic model --- finite degree of randomness --- random finite difference scheme --- relativistic harmonic oscillator --- kinematics of a particle --- special relativity --- nonlinear problems in mechanics --- equations of motion in gravitational theory --- virus propagation --- stochastic modeling --- Gillespie algorithm --- conservative formulation --- multidimensional fragmentation equation --- weight functions --- finite volume scheme --- contamination plume --- advection-diffusion --- universal curves --- Dirichlet-to-Neumann map --- Schrödinger operator --- contagion effect --- difference equation --- elections --- labor condition --- mathematical compartmental discrete model --- political corruption --- revolving doors --- sensitivity analysis --- simulation --- numerical methods --- integro-interpolation method --- splitting method --- convergence of models --- standard deviation of the error --- diabetic retinopathy --- ocular fundus --- laser coagulation --- optical coherence tomography --- image processing --- segmentation --- safe treatment --- Hermite interpolation --- nodal systems --- unit circle --- circular membrane --- fluid-structure interaction --- differential-integral equations --- power series method --- closed-form solution --- time series model --- wavelet transform --- ARIMA model --- neural network NARX --- ionospheric parameters --- courtyard --- climate change --- microclimate --- Support Vector Regression (SVR) --- machine learning --- matrix functions --- matrix hyperbolic tangent --- matrix exponential --- Taylor series --- matrix polynomial evaluation