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Surface roughness. --- Surface contamination.

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Surface contamination --- Prevention. --- Contamination (Technology) --- Surfaces (Technology)

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Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9 , part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods. This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Provides a comprehensive coverage of innovations in surface cleaning Written by established experts in the surface cleaning field, presenting an authoritative resource Contains a comprehensive review of the state-of-the-art, including case studies to enhance the learning process

Surfaces (Technology) --- Surface contamination --- Particles --- Inspection. --- Prevention. --- Measurement.

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Surface chemistry --- fysicochemie --- Materials sciences --- Surfaces (Technology) --- Surface preparation --- Surface contamination

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As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters i

Surfaces (Technology) --- Surface contamination --- Prevention. --- Contamination (Technology) --- Materials --- Surface phenomena --- Friction --- Surfaces (Physics) --- Tribology --- Surfaces