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dissertation (1)

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2005 (1)

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Dissertation

Co and Ni-based silicides for sub-45nm CMOS technologies.
Authors: Chamirian, Oxana --- Maex, Karen --- K.U.Leuven. Faculteit Ingenieurswetenschappen. Departement Elektrotechniek (ESAT) --- IMEC.
ISBN: 9056826514 Year: 2005 Publisher: Leuven K.U.Leuven. Faculteit Ingenieurswetenschappen

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Abstract

Keywords
621.3.049 <043> --- 661.685 <043> --- Academic collection --- Construction of the electric circuit -- Dissertations --- Silicohydrides. Silicides -- Dissertations --- Theses

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