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Book
Fully depleted silicon-on-insulator : nanodevices, mechanisms and characterization
Author:
ISBN: 0128231653 0128196432 9780128231654 9780128196434 Year: 2021 Publisher: Amsterdam : Elsevier,

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Book
Handbook of silicon wafer cleaning technology
Authors: ---
ISBN: 9780323510851 032351085X 9780323510844 0323510841 Year: 2018 Publisher: Oxford, [England] ; Cambridge, [Massachusetts] : William Andrew,

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Handbook of silicon wafer cleaning technology
Authors: ---
ISBN: 1282769707 0080947468 9786612769702 1282002821 9786612002823 0815517734 0815515545 9780815517733 9780815515548 9780815517719 0815517718 9781282769700 9780080947464 661276970X 9781282002821 6612002824 Year: 2008 Publisher: Norwich William Andrew

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The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. Both the process and t


Book
Physical and technical problems of SOI structures and devices
Author:
ISBN: 0792336003 9401040524 9401101094 9780792336006 Year: 1995 Volume: 4 Publisher: Dordrecht Kluwer

Silicon and beyond : advanced device models and circuit simulators
Authors: ---
ISBN: 9812793216 9789812793218 9810242808 9789810242800 Year: 2000 Publisher: Singapore ; River Edge, NJ : World Scientific,

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The steady downscaling of device-feature size combined with a rapid increase in circuit complexity as well as the introduction of new device concepts based on non-silicon-material systems poses great challenges for device and circuit designers. One of the major tasks is the development of new and improved device models needed for accurate device and circuit design. Another task is the development of new circuit-simulation tools to handle very large and complex circuits. This book addresses both these issues with up-to-date reviews written by leading experts in the field.The first three chapter

SOI circuit design concepts
Authors: ---
ISBN: 9780792377627 0792377621 9780306470134 0387740996 9786610205851 1280205857 0306470136 Year: 2007 Publisher: [Place of publication not identified] : Springer Science+Business Media, LLC,

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Market demand for microprocessor performance has motivated continued scaling of CMOS through a succession of lithography generations. Quantum mechanical limitations to continued scaling are becoming readily apparent. Partially Depleted Silicon-on-Insulator (PD-SOI) technology is emerging as a promising means of addressing these limitations. It also introduces additional design complexity which must be well understood. SOI Circuit Design Concepts first introduces the student or practicing engineer to SOI device physics and its fundamental idiosyncrasies. It then walks the reader through realizations of these mechanisms which are observed in common high-speed microprocessor designs. Rules of thumb and comparisons to conventional bulk CMOS are offered to guide implementation. SOI's ultimate advantage, however, may lie in the unique circuit topologies it supports; a number of these novel new approaches are described as well. SOI Circuit Design Concepts draws upon the latest industry literature as well as the firsthand experiences of its authors. It is an ideal introduction to the concepts of governing SOI use and provides a firm foundation for further study of this exciting new technology paradigm.

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