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Actuators. --- High Reynolds number. --- Plasma generators. --- Aeroacoustics. --- Flow regulators. --- High speed. --- Gas dynamics.

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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and pr

Plasma density. --- Plasma generators. --- High temperature plasmas. --- Plasma (Gaz ionisés) --- Générateurs de plasma --- Plasmas chauds --- Densité --- Plasma density --- Plasma generators --- High temperature plasmas --- Plasma (Gaz ionisés) --- Générateurs de plasma --- Densité --- Engineering --- Electronics --- Hot plasmas --- Plasmas, High temperature --- Gases at high temperatures --- Plasma (Ionized gases) --- Magnetohydrodynamic generators --- Plasma devices --- Plasma jets --- Density, Plasma

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This book presents experimental and theoretical results on extremely powerful plasma generators. It addresses pulsed electrical mega-ampere arcs and the mechanisms of energy transfer from the arc into hydrogen, helium and air under pressures up to 250 MPa and currents up to 2 MA. Extreme plasma parameters and increased energy density in the arc were achieved. It was found experimentally that increasing the initial gas pressure to hundreds of MPa leads to improved arc stability, high efficiency of energy transfer from arc to gas, and plasma enthalpy growth. The data obtained data provides the basis for the development of electrophysical devices with high energy density, e.g. high intensity sources for visible, UV and X-ray irradiation for laser pumping, generators of high enthalpy plasma jets, and plasma chemical reactors.

Plasma generators. --- Magnetohydrodynamic generators --- Plasma (Ionized gases) --- Plasma devices --- Plasma jets --- Engineering. --- Chemical engineering. --- Plasma Physics. --- Materials Engineering. --- Measurement Science and Instrumentation. --- Engineering Thermodynamics, Heat and Mass Transfer. --- Industrial Chemistry/Chemical Engineering. --- Chemistry, Industrial --- Engineering, Chemical --- Industrial chemistry --- Engineering --- Chemistry, Technical --- Metallurgy --- Construction --- Industrial arts --- Technology --- Plasma (Ionized gases). --- Engineering—Materials. --- Physical measurements. --- Measurement   . --- Thermodynamics. --- Heat engineering. --- Heat transfer. --- Mass transfer. --- Mass transport (Physics) --- Thermodynamics --- Transport theory --- Heat transfer --- Thermal transfer --- Transmission of heat --- Energy transfer --- Heat --- Mechanical engineering --- Chemistry, Physical and theoretical --- Dynamics --- Mechanics --- Physics --- Heat-engines --- Quantum theory --- Measuring --- Mensuration --- Mathematics --- Metrology --- Physical measurements --- Measurements, Physical --- Mathematical physics --- Measurement --- Gaseous discharge --- Gaseous plasma --- Magnetoplasma --- Ionized gases