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NEMS/MEMS technology and devices
Authors: ---
ISBN: 9783038136095 3038136093 9781621986850 1621986853 9783037851456 3037851457 Year: 2011 Publisher: Durnten-Zurich Enfield, NH Trans Tech

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Abstract

The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati

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