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The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati

Nanoelectromechanical systems --- Microelectromechanical systems --- Nano-electro-mechanical systems --- Nanoelectromechanical devices --- Nanomechanical devices --- Nanomechanical machines --- Nanomechanical systems --- Nanometer scale devices --- Nanoscale devices --- Nanoscale electronic devices --- Nanostructured devices --- NEMS (Nanotechnology) --- Nanoelectronics --- Nanostructures --- Electromechanical devices --- NEMS/MEMS technology --- Materials --- Advanced technologies --- ICMAT