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Nowadays, we meet microsystems in a variety of devices used in modern life. They are used, for example, in medicine, biology, industry, home appliances, transport, and aerospace. One of the main problems in the technological development of microsystems is their actuation. Several solutions have been suggested, such as electrostatic, electrothermal, electromagnetic, or piezoelectric actuation, although a valid solution seems to be still out of our reach. Another crucial problem in designing, manufacturing, and operating microsystems for micromanipulation consists in the loss of some basic paradigms commonly used as a source of inspiration at the macroscale. The differences in designing at the two different scales may have either positive or negative effects. For example, an unthinkable structure in the day–life domain, as, for example, a long “cantilever” bridge over the Hudson river, would become possible after downscaling “everything” from road dimensions to the micro-world. Alternatively, a fantastic electric motor that works very well in our world, by virtue of the basic principles of electromagnetism, would become useless if scaled back to the micro cosmos. This book opens a small window on the world of research, presenting a group of papers that try to respond to the challenge of increasing the efficiency and functionality of modern microsystems. A final little section is also dedicated to the development of new teaching methods successfully adopted in some university courses.

Microsystems --- Control --- Dynamics --- Kinematics --- NEMS --- Microactuators --- MEMS --- Micromanipulation --- Microgrippers

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The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati

Nanoelectromechanical systems --- Microelectromechanical systems --- Nano-electro-mechanical systems --- Nanoelectromechanical devices --- Nanomechanical devices --- Nanomechanical machines --- Nanomechanical systems --- Nanometer scale devices --- Nanoscale devices --- Nanoscale electronic devices --- Nanostructured devices --- NEMS (Nanotechnology) --- Nanoelectronics --- Nanostructures --- Electromechanical devices --- NEMS/MEMS technology --- Materials --- Advanced technologies --- ICMAT

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engineering --- computational mechanics --- nanotechnology --- numerical analysis --- nems --- mechanics --- Engineering --- Science --- Engineering. --- Science. --- Natural science --- Science of science --- Sciences --- Construction --- Industrial arts --- Technology --- Natural sciences

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Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

encapsulation --- n/a --- NEM memory switch --- magnetotransistor --- gas sensor --- nano-system array --- metal oxide (MOX) sensor --- capacitive pressure sensor --- real-time temperature compensation loop --- mechanical relays --- single-crystal silicon (SC-Si) --- MEMS relays --- MEMS --- oscillator --- micro-electro-mechanical system (MEMS) --- uncooled IR-bolometer --- microelectromechanical systems --- microbolometer --- programmable sustaining amplifier --- micro sensor --- CMOS-MEMS --- pierce oscillator --- MEMS resonators --- micro/nanoelectromechanical systems (MEMS/NEMS) --- resonator --- microhotplate --- NEMS --- application-specific integrated circuit (ASIC) --- MEMS modelling --- magnetic field --- chopper instrumentation amplifier --- microresonators --- interface circuit --- Hall effect --- thermal detector --- temperature sensor --- infrared sensor --- CMOS–NEMS --- CMOS --- atomic force microscope --- MEMS switches --- stent --- micro-electro-mechanical systems (MEMS) sensors --- nano resonator --- silicon-on-insulator (SOI) --- MEMS-ASIC integration --- Sigma-Delta --- MEMS characterization --- high-Q capacitive accelerometer --- mass sensors --- M3D --- CMOS-NEMS

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Nanoelectromechanical systems --- Microelectromechanical systems --- Nanostructured materials --- Nano-electro-mechanical systems --- Nanoelectromechanical devices --- Nanomechanical devices --- Nanomechanical machines --- Nanomechanical systems --- Nanometer scale devices --- Nanoscale devices --- Nanoscale electronic devices --- Nanostructured devices --- NEMS (Nanotechnology) --- Nanoelectronics --- Nanostructures --- Electromechanical devices