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ISBN: 012133550X Year: 1980 Publisher: New York (N.Y.): Academic press
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ISBN: 9780819480514 Year: 2010 Publisher: Bellingham SPIE
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Extreme ultraviolet lithography --- Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- Industrial applications
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Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- X-ray lithography --- X-rays --- Industrial applications --- Industrial applications
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Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- X-ray lithography --- X-rays --- Industrial applications --- Industrial applications
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Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- X-ray lithography --- X-rays --- Industrial applications --- Industrial applications
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ISBN: 9780819466365 Year: 2007 Publisher: Bellingham SPIE
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Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- X-ray lithography --- X-rays --- Industrial applications --- Industrial applications
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Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- X-ray lithography --- X-rays --- Industrial applications --- Industrial applications
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Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- X-ray lithography --- X-rays --- Industrial applications --- Industrial applications
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ISBN: 9780819473813 Year: 2008 Publisher: Bellingham SPIE
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Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- X-ray lithography --- X-rays --- Industrial applications --- Industrial applications
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Lithography, Electron beam --- Masks (Electronics) --- Microlithography --- X-ray lithography --- X-rays --- Industrial applications --- Industrial applications
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