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Extreme ultraviolet lithography --- Integrated circuits --- Ion beam lithography --- Lithography, Electron beam --- X-ray lithography --- Masks

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Fysica --- Ion beam lithography --- Lithografie door elektronenbundel --- Lithografie door ionenbundel --- Lithografie door röntgenstralen --- Lithographie par faisceau d'ions --- Lithographie par faisceau d'électrons --- Lithographie par rayons X --- Lithography [Electron beam ] --- Natuurkunde --- Physics --- Physique --- X-ray lithography --- Lithography, Electron beam. --- X-ray lithography. --- Ion beam lithography. --- Physics. --- 621.3.049.77 --- Lithography, Electron beam --- 538.97 --- Lithography --- X-rays --- Natural philosophy --- Philosophy, Natural --- Physical sciences --- Dynamics --- Electron beam lithography --- Electron beams --- Microelectronics --- Photolithography --- Ion bombardment --- Microelectronics. Integrated circuits --- Special geometry and interaction with particles and radiation --- Industrial applications --- 538.97 Special geometry and interaction with particles and radiation --- 621.3.049.77 Microelectronics. Integrated circuits

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621.9.048 --- Design, Industrial --- -Rapid prototyping --- Rapid tooling --- Ion beam lithography --- Patternmaking --- CAD/CAM systems --- Computer Aided Design/Computer Aided Manufacturing Systems --- Computer Aided Manufacturing Systems --- Computer-aided engineering --- Computer integrated manufacturing systems --- Production engineering --- Production management --- Automation --- Pattern-making --- Models and modelmaking --- Founding --- Ion bombardment --- Lithography --- Tooling, Rapid --- Manufacturing processes --- Desktop automated manufacturing --- Freeform fabrication --- Freeform manufacturing --- Prototyping, Rapid --- RP (Rapid prototyping) --- Prototypes, Engineering --- Mechanical drawing --- New products --- Design --- Erosion machining, blasting. Spark erosion. Ultrasonic, vibration machining. Machining with particle beams. Electron-beam machining etc. --- Data processing --- Industrial applications --- 621.9.048 Erosion machining, blasting. Spark erosion. Ultrasonic, vibration machining. Machining with particle beams. Electron-beam machining etc. --- Industrial design --- Rapid prototyping --- Laser sintering --- Erosion machining, blasting. Spark erosion. Ultrasonic, vibration machining. Machining with particle beams. Electron-beam machining etc --- Rapid prototyping. --- Additive manufacturing