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Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers.

Integrated circuits -- Design and construction. --- Integrated circuits. --- Microlithography.

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Digital integrated circuits --- Design and construction --- Design and construction. --- Digital integrated circuits - Design and construction

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Contaminatie (Technologie) --- Contamination (Technologie) --- Contamination (Technology) --- Integrated circuits --- Design and construction --- Impurities (Technology) --- Industrial contamination --- Particulate contamination in industry --- Factory sanitation --- Design and construction. --- Contamination (Technology). --- Integrated circuits - Design and construction. --- Integrated circuits - Design and construction

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1. Device Physics 
2. Semiconductor fabrication 
3. Representative processes 
4. Failure mechanisms 
5. Resistors 
6. Capacitors and inductors 
7.Matching of resistors and capacitors 
8. Bipolar transistors 
9. Applications of bipolar transistors 
10. Diodes 
11. Field-effect transistors 
12. Applications of MOS transistors 
13. Special Topics 
14. Assembling the Die


halfgeleiders --- versterkers --- ESD (electrostatic discharge) --- Electronics --- transistoren --- analoge technieken --- MOS (metal oxyd semiconductor) --- elektronische schakelingen --- Integrated circuits --- Layout (Printing) --- Design and construction --- Integrated circuits - Design and construction

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Integrated circuits --- Design and construction --- Circuits intégrés numériques --- Conception et construction --- Conception et construction. --- Integrated circuits - Design and construction --- Circuits intégrés numériques