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543.063 <063> --- Solids --- -Electron beams --- -Backscattering --- -Microlithography --- -Electron energy loss spectroscopy --- -Electrons --- -Corpuscular theory of matter --- Atoms --- Leptons (Nuclear physics) --- Matter --- Particles (Nuclear physics) --- Cathode rays --- Ions --- Positrons --- EELS (Spectrum analysis) --- Energy loss spectroscopy, Electron --- Spectroscopy, Electron energy loss --- Electron spectroscopy --- Lithography --- Microtechnology --- Back scatter --- Scattering (Physics) --- Beams, Electron --- Electron optics --- Electronics --- Particle beams --- Solid state physics --- Transparent solids --- 543.063 <063> Analytical chemistry--?.063--Congressen --- Analytical chemistry--?.063--Congressen --- Effect of radiation on --- -Congresses --- Congresses --- Backscattering --- Constitution --- Electron beams --- Electron energy loss spectroscopy --- Microlithography --- Faisceaux électroniques --- Scattering --- Diffusion --- Faisceaux électroniques --- Electronics and optics of solids --- Electrons --- Congrès --- Congresses.