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546.821-31 --- 539.23 --- Titanium, Ti, in general--?-31 --- Production of thin films --- 539.23 Production of thin films --- 546.821-31 Titanium, Ti, in general--?-31

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Microelectronics --- Silicon --- 538.9 --- 539.23 --- 539.23 Production of thin films --- Production of thin films --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Materials --- Congresses --- Physics of condensed matter (in liquid state and solid state)

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Thin film devices --- Vapor-plating --- Plasma engineering --- Dispositifs à couches minces --- Placage en phase vapeur --- Plasmas, Technique des --- 533.95 --- 539.23 --- Coating, Vacuum --- Deposition, Vapor --- Vacuum coating --- Vacuum metallizing --- Vapor deposition --- Vapor-phase deposition --- Ion plating --- Plating --- Protective coatings --- Refractory materials --- Vacuum technology --- Devices, Thin film --- Electronic apparatus and appliances --- Thin films --- Engineering --- Plasma (Ionized gases) --- Plasma dynamics --- Production of thin films --- 539.23 Production of thin films --- 533.95 Plasma dynamics --- Dispositifs à couches minces

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Mechanical properties of solids --- Surface chemistry --- Chemisorption --- Metallic films --- Chimie des surfaces --- Chimisorption --- Couches minces métalliques --- 541.183 --- 541.183.2 --- 539.23 --- Chemistry, Surface --- Interfaces, Chemistry of --- Surface phenomena --- Surfaces (Chemistry) --- Chemistry, Physical and theoretical --- Capillarity --- Surface energy --- Surface tension --- Surfaces (Physics) --- Films, Metallic --- Metals --- Surfaces (Technology) --- Thin films --- Adsorption --- Contact systems. Adsorption. Surface chemistry --- Adsorption mechanism --- Production of thin films --- Chemisorption. --- Metallic films. --- Surface chemistry. --- Basic Sciences. Chemistry --- Physical Chemistry --- Colloid and Surface Chemistry --- Colloid and Surface Chemistry. --- 539.23 Production of thin films --- 541.183.2 Adsorption mechanism --- 541.183 Contact systems. Adsorption. Surface chemistry --- Couches minces métalliques