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"Journal of Vacuum Science &Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science,thin-film materials science, and vacuum science and technology." "Coverage: Applied and fundamental surface science; atomic layer deposition; electronic and photonic materials and their processing; magnetic thin films and interfaces; materials and thin films for energy conversion and storage; photovoltaics including thin-film and organic; plasma science and technology including plasma-surface interactions,diagnostics, deposition, and etching; applications of plasmas to micro- and nanoelectronics; surface engineering; thin-film deposition, etching, properties, and characterization; TEM; in-situ TEM; tribology; vacuum science and technology."

E-journals --- Vacuum technology --- Surfaces (Physics) --- Surface chemistry --- Thin films --- Vide (Technologie) --- Chimie des surfaces --- Surfaces (Physique) --- Couches minces --- Engineering --- Material Science and Metallurgy --- Physics --- Electronics --- Mechanical Engineering --- Coatings and Films --- General and Others --- Nanomaterials --- Plasma Physics --- Films, Thin --- Solid film --- Industrial vacuum --- Vacuum --- Vacuum in industry --- Industrial applications --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Ultrahigh vacuum --- שכבות דקות --- כימיה של פני שטח --- משטחים (פיזיקה) --- טכנולוגיית ריק --- Journal --- Periodicals