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dissertation (1)

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2004 (1)

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Dissertation

MEMS reliability stiction, charging and RF MEMS
Authors: Van Spengen, Merlijn --- KUL. Faculteit toegepaste wetenschappen. Departement elektrotechniek - ESAT - INSYS : integrated systems --- IMEC.
ISBN: 9056825046 Year: 2004

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Abstract

Keywords
681.58 --- Components of automatic control systems. Servocomponents --- Theses --- 681.58 Components of automatic control systems. Servocomponents

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