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ISBN: 084121400X Year: 1988 Volume: vol 218 Publisher: Washington : ACS - American Chemical Society,
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Chemistry --- Physical Sciences & Mathematics --- Chemistry - General --- Microlithography --- Photoresists --- Polymers. --- Materials --- Congresses. --- Polymers and polymerization --- Congresses --- Electric conductivity. --- Langmuir-blodgett films --- Lithography --- Optical devices --- Organic resist materials
Book
ISBN: 0841224005 Year: 1988 Publisher: Washington, DC : American Chemical Society,
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Polymers --- Photoresists --- Microlithography --- Materials
ISBN: 0841214069 Year: 1987
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Book
ISBN: 0841211892 Year: 1987 Publisher: Washington, District of Columbia : American Chemical Society,
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Polymers --- Photoresists --- Microlithography --- Microelectronics --- Materials --- Materials
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