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Silicon nitride and silicon dioxide thin insulating films : proceedings of the 5th international symposium
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Author: Sundaram, K.B.
ISBN: 1566772281 Year: 1999 Publisher: Pennington Electrochemical society
ISBN: 1566772281 Year: 1999 Publisher: Pennington Electrochemical society
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Abstract
Keywords
Electric insulators and insulation --- Silica --- Silicon nitride --- Thin film devices --- Thin films
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