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This thesis by Rui Shu examines the development and properties of high entropy ceramic films, specifically (TiNbZrTa)Nx, using reactive magnetron sputtering. The research focuses on the effects of deposition parameters like substrate temperature and nitrogen flow ratio on the microstructure and mechanical, electrical, and corrosion-resistant properties of these films. Key findings include the correlation between nitrogen content and corrosion resistance, as well as the structural transitions observed at various deposition temperatures. The study aims to advance the understanding of protective nitride films, with potential applications in corrosion-resistant coatings for fuel cells and batteries. The work is a part of doctoral studies in Materials Science at Linköping University and supported by various academic and industrial collaborations.
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This dissertation by Rui Shu investigates the process-structure-property relationships of refractory high-entropy alloys and nitrides, primarily synthesized through magnetron sputtering. The research focuses on understanding the effects of substrate temperature and nitrogen flow on the mechanical, electrical, and corrosion-resistant properties of TiZrNbTaNx nitrides. The study also explores the impact of ion energy and metal substitution on the evolution of high-entropy nitride films. Furthermore, the dissertation examines structural stability and elemental segregation under irradiation, as well as the superconducting properties of these materials. The work is intended for professionals and researchers in materials science, particularly those interested in the development and application of high-entropy materials for advanced coatings and superconductors.
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