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Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation, and the Casimir effect, and quantum wave phenomena, including, quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity and cavity quantum electrodynamics. Potential building blocks are also addressed for NanoMEMS applications, including, nanoelectromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer, and the Casimir oscillator, as well as a number of quantum computing implementation paradigms. Finally, NanoMEMS applications in photonics are addressed, including nanophotonic light sources and plasmonic devices.

Quantum electronics. --- Wave-particle duality. --- Nanotechnology. --- Microelectromechanical systems. --- Molecular technology --- Nanoscale technology --- High technology --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Dualism, Wave-particle --- Duality principle (Physics) --- Wave-corpuscle duality --- Complementarity (Physics) --- Electromagnetic waves --- Matter --- Radiation --- Wave mechanics --- Electronics --- Quantum electrodynamics --- Constitution --- Optical materials. --- Computer engineering. --- Optical and Electronic Materials. --- Electrical Engineering. --- Optics, Lasers, Photonics, Optical Devices. --- Quantum Optics. --- Computers --- Optics --- Materials --- Design and construction --- Electronic materials. --- Electrical engineering. --- Lasers. --- Photonics. --- Quantum optics. --- Photons --- Quantum theory --- New optics --- Light amplification by stimulated emission of radiation --- Masers, Optical --- Optical masers --- Light amplifiers --- Light sources --- Optoelectronic devices --- Nonlinear optics --- Optical parametric oscillators --- Electric engineering --- Engineering --- Electronic materials