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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures. Contents Fundamentals of flash lamp annealing of shallow Boron-doped Silicon Fundamentals of surface temperature measurements during flash lamp annealing Concept of ripple pyrometry during flash lamp annealing      Ripple pyrometry for flash lamp annealing – Experiments Target Groups ·Researchers and students from the fields of materials sciences and physics ·Practitioners from microelectronics and photovoltaics industry About the Author Dr. Denise Reichel currently works in technical sales and consulting for temperature  measurement needs and as a lecturer for thermodynamics and heat and mass transfer.  .

Atomic Physics --- Physics --- Physical Sciences & Mathematics --- Pyrometry. --- Annealing of metals. --- High temperatures --- Pyrometers and pyrometry --- Measurement --- Physics. --- Thermodynamics. --- Solid state physics. --- Engineering --- Solid State Physics. --- Materials Engineering. --- Materials. --- Metals --- Temperature measurements --- Heat treatment --- Chemistry, Physical and theoretical --- Dynamics --- Mechanics --- Heat --- Heat-engines --- Quantum theory --- Engineering—Materials. --- Solids

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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

Semiconductors. --- Optical materials. --- Electronic materials. --- Manufactures. --- Lasers. --- Photonics. --- Microwaves. --- Optical engineering. --- Nanotechnology. --- Optical and Electronic Materials. --- Manufacturing, Machines, Tools, Processes. --- Optics, Lasers, Photonics, Optical Devices. --- Microwaves, RF and Optical Engineering. --- Nanotechnology and Microengineering. --- Crystalline semiconductors --- Semi-conductors --- Semiconducting materials --- Semiconductor devices --- Crystals --- Electrical engineering --- Electronics --- Solid state electronics --- Materials --- Molecular technology --- Nanoscale technology --- High technology --- Mechanical engineering --- Hertzian waves --- Electric waves --- Electromagnetic waves --- Geomagnetic micropulsations --- Radio waves --- Shortwave radio --- Electronic materials --- New optics --- Optics --- Light amplification by stimulated emission of radiation --- Masers, Optical --- Optical masers --- Light amplifiers --- Light sources --- Optoelectronic devices --- Nonlinear optics --- Optical parametric oscillators --- Manufactured goods --- Manufactured products --- Products --- Products, Manufactured --- Commercial products --- Manufacturing industries