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Workshop summary report : scanning probe nanolithography workshop
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Authors:
Dagata, John A.
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Perez-Murano, Francesc.
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Yokoyama, Hiroshi.
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Manufacturing Engineering Laboratory (U.S.)
Year: 2003 Publisher: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology,
Year: 2003 Publisher: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology,
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