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Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

Transducers --- Microelectronics --- Computer-aided design --- -Transducers --- -Electric apparatus and appliances --- Electromechanical devices --- Electronic apparatus and appliances --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- -Computer-aided design --- Electric apparatus and appliances --- Electronics. --- Microelectronics. --- Nanotechnology. --- Optical materials. --- Electronic materials. --- Computer simulation. --- Numerical analysis. --- Electronics and Microelectronics, Instrumentation. --- Optical and Electronic Materials. --- Simulation and Modeling. --- Numerical Analysis. --- Mathematical analysis --- Computer modeling --- Computer models --- Modeling, Computer --- Models, Computer --- Simulation, Computer --- Electromechanical analogies --- Mathematical models --- Simulation methods --- Model-integrated computing --- Electronic materials --- Optics --- Materials --- Molecular technology --- Nanoscale technology --- High technology --- Electrical engineering --- Physical sciences --- Computer-aided design. --- Transducers - Computer-aided design --- Microelectronics - Computer-aided design

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Touch screen panels (TSPs) have become an integral part of modern-day lifestyle. To enhance user experience, attributes such as form-factor flexibility, multi-dimensional sensing, low power consumption and low cost have become highly desirable. This Element addresses the design of multi-functional TSPs with integrated concurrent capture of ubiquitous capacitive touch signals and force information. It compares and contrasts interactive technologies and presents design considerations for multi-dimensional touch screens with high detection sensitivity, accuracy and resolution.

User interfaces (Computer systems) --- Human-computer interaction.

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As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

Electronics and optics of solids --- Physics --- Spectrometric and optical chemical analysis --- Electronics --- IR spectroscopie --- toegepaste wetenschappen --- elektronica --- fysica --- transistoren --- halfgeleiders --- fysicochemie