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Silicides for VLSI Applications
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ISBN: 0125112203 0080570569 1299224326 9780125112208 Year: 1983 Publisher: New York, NY ; London : Academic Press,

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Interface control of electrical, chemical, and mechanical properties
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ISBN: 1558992170 Year: 1994 Publisher: Pittsburgh Materials research society

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Silicides for VLSI-applications
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Year: 1974 Publisher: Orlando Institute of internal auditors

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Advanced metallization for devices and circuits - science, technology and manufacturability
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ISBN: 1558992375 Year: 1994 Publisher: Pittsburgh Materials research society

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Interlayer dielectrics for semiconductor technologies
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ISBN: 1281020540 9786611020545 0080521959 0125112211 Year: 2003 Publisher: Amsterdam ; Boston : Elsevier/Academic Press,

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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and t

Interlayer dielectrics for semiconductor technologies
Authors: --- ---
ISBN: 9780125112215 0125112211 9780080521954 0080521959 Year: 2003 Publisher: Amsterdam Boston Elsevier/Academic Press

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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package. * Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume * written by renowned experts in the field * Provides an up-to-date starting point in this young research field.

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