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Experimental nuclear and elementary particle physics --- Nuclear physics --- Electronics and optics of solids --- Solid state physics --- Physicochemistry --- Materials sciences --- materiaalkennis --- deeltjesfysica --- kernenergie --- fysica --- transistoren --- halfgeleiders --- fysicochemie

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Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and circuits are seldom processed with less than 10 implantation steps. Controlled doping at controlled depths is an essential feature of implantation. Ion beam processing can also be used to improve corrosion resistance, to harden surfaces, to reduce wear and, in general, to improve materials properties. This book presents the physics and materials science of ion implantation and ion beam modification of materials. It covers ion-solid interactions used to predict ion ranges, ion straggling and lattice disorder. Also treated are shallow-junction formation and slicing silicon with hydrogen ion beams. Topics important for materials modification, such as ion-beam mixing, stresses, and sputtering, are also described.

Ion implantation. --- Metals --- Finishing. --- Metal finishing --- Finishes and finishing --- Metal-work --- Implantation, Ion --- Ion bombardment --- Ion plating --- Particle acceleration. --- Optical materials. --- Surfaces (Physics). --- Chemistry, Physical organic. --- Particle Acceleration and Detection, Beam Physics. --- Condensed Matter Physics. --- Optical and Electronic Materials. --- Characterization and Evaluation of Materials. --- Physical Chemistry. --- Chemistry, Physical organic --- Chemistry, Organic --- Chemistry, Physical and theoretical --- Physics --- Surface chemistry --- Surfaces (Technology) --- Optics --- Materials --- Particles (Nuclear physics) --- Acceleration (Mechanics) --- Nuclear physics --- Acceleration --- Condensed matter. --- Electronic materials. --- Materials science. --- Physical chemistry. --- Chemistry, Theoretical --- Physical chemistry --- Theoretical chemistry --- Chemistry --- Material science --- Physical sciences --- Electronic materials --- Condensed materials --- Condensed media --- Condensed phase --- Materials, Condensed --- Media, Condensed --- Phase, Condensed --- Liquids --- Matter --- Solids

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Materials sciences --- Surfaces (Technology) --- Thin films --- Surfaces (Technologie) --- Analysis --- Analyse --- -Thin films --- -Films, Thin --- Solid film --- Solid state electronics --- Solids --- Coatings --- Thick films --- Characterization of surface --- Surface analysis --- Surface characterization --- Chemistry, Analytic --- Surface chemistry --- Analysis. --- -Analysis --- Films, Thin --- SPUTTERING --- ELECTRON DIFFRACTION --- Energy loss --- AUGER ELECTRONS --- RUTHERFORD SCATTERING --- X-RAY DIFFRACTION --- CHANNELING --- PHOTOELECTRON SPECTROSCOPY --- Monograph --- Electrons --- Photoelectron spectroscopy. --- Spectroscopy, Photoelectron --- Electron spectroscopy --- Molecular orbitals --- Molecular spectra --- Molecular spectroscopy --- Photoelectricity --- Spectrum analysis --- Electron diffraction --- Diffraction --- Diffraction. --- Analytical chemistry --- Surfaces (Technology) - Analysis --- Thin films - Analysis

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Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on analysis of the structure and composition of the surface and the outer few tens to hundred nanometers in depth. It describes characterization techniques to quantify the structure, composition and depth distribution of materials with the use of energetic particles and photons. The book describes the fundamentals of materials characterization from the standpoint of the incident photons or particles which interrogate nanoscale structures. These induced reactions lead to the emission of a variety of detected of particles and photons. It is the energy and intensity of the detected beams that is the basis of the characterization of the materials. The array of experimental techniques used in nanoscale materials analysis covers a wide range of incident particle and detected beam interactions. Included are such important interactions as atomic collisions, Rutherford backscattering, ion channeling, diffraction, photon absorption, radiative and nonradiative transitions, and nuclear reactions. A variety of analytical and scanning probe microscopy techniques are presented in detail.

Thin films. --- Nanostructured materials. --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Nanomaterials --- Nanometer materials --- Nanophase materials --- Nanostructure controlled materials --- Nanostructure materials --- Ultra-fine microstructure materials --- Microstructure --- Nanotechnology --- Surfaces (Physics). --- Nanotechnology. --- Characterization and Evaluation of Materials. --- Surfaces and Interfaces, Thin Films. --- Solid State Physics. --- Spectroscopy and Microscopy. --- Condensed Matter Physics. --- Molecular technology --- Nanoscale technology --- High technology --- Physics --- Surface chemistry --- Materials science. --- Materials—Surfaces. --- Solid state physics. --- Spectroscopy. --- Microscopy. --- Condensed matter. --- Condensed materials --- Condensed media --- Condensed phase --- Materials, Condensed --- Media, Condensed --- Phase, Condensed --- Liquids --- Matter --- Analysis, Microscopic --- Light microscopy --- Micrographic analysis --- Microscope and microscopy --- Microscopic analysis --- Optical microscopy --- Optics --- Analysis, Spectrum --- Spectra --- Spectrochemical analysis --- Spectrochemistry --- Spectroscopy --- Chemistry, Analytic --- Interferometry --- Radiation --- Wave-motion, Theory of --- Absorption spectra --- Light --- Spectroscope --- Material science --- Physical sciences --- Qualitative --- Materials --- Surfaces. --- Surface phenomena --- Friction --- Surfaces (Physics) --- Tribology --- Surfaces --- Spectrometry --- Analytical chemistry --- Materials—Analysis. --- Surfaces (Technology). --- Spectrum analysis. --- Characterization and Analytical Technique. --- Surfaces, Interfaces and Thin Film.