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Dissertation
Silicon oxidation : modelling, characterization and strategic considerations.
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Authors:
Ling, Zhi-min
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KUL. Faculteit toegepaste wetenschappen. Departement elektrotechniek - ESAT
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IMEC.
Year: 1989 Publisher: Leuven KU Leuven. Faculteit Ingenieurswetenschappen
Year: 1989 Publisher: Leuven KU Leuven. Faculteit Ingenieurswetenschappen
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