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Metal oxide semiconductors, Complementary --- Integrated circuits --- Silicon-on-insulator technology --- Very large scale integration --- Metal oxide semiconductors, Complementary. --- Silicon-on-insulator technology. --- Very large scale integration. --- SOI devices --- CMOS (Electronics) --- Complementary metal oxide semiconductors --- Semiconductors, Complementary metal oxide --- Very large scale integration of circuits --- VLSI circuits --- Electric insulators and insulation --- Semiconductors --- Digital electronics --- Logic circuits --- Transistor-transistor logic circuits --- Integrated circuits - Very large scale integration