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Transducers --- Microelectromechanical systems --- Electric apparatus and appliances --- Electromechanical devices --- Electronic apparatus and appliances --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Microtechnology --- Mechatronics