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Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.

Talbot effect --- Röntgengitter --- LIGA --- X-ray optics --- Phasenkontrast --- Talbot-Effect --- phase contrast --- X-ray gratings --- Röntgenoptik