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Scanning electron microscope optics and spectrometers
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ISBN: 1283143550 9786613143556 9812836683 9789812836687 9789812836670 9812836675 9781283143554 6613143553 Year: 2011 Publisher: Singapore ; Hackensack, N.J. : World Scientific Pub. Co.,

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Abstract

This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engi

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