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Ion implantation : equipment & techniques : proceedings of the Fifth International Conference on Ion Implantation Equipment & Techniques, Smugglers' Notch, Jeffersonville VT, USA, July 23-27, 1984
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Authors:
Ziegler, James F.
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Brown, R. L.
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International conference on ion implantation equipment and techniques (5th : 1984 : Jeffersonville, Vt.)
Year: 1985 Publisher: Amsterdam: North-Holland,
Year: 1985 Publisher: Amsterdam: North-Holland,
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