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Microcircuit engineering '79 : microstructure fabrication : proceedings, 25-27 September 1979, Aachen
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Authors:
Institute of electrical and electronic engineers
---
Institute of semiconductor electronics
Year: 1980
Year: 1980
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Book
Microcircuit engineering '79 - microstructure fabrication - : proceedings, 25-27 september 1979 rwth aachen
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Authors:
Institute Of Semiconductor Electronics (Aachen{Rpara}
---
Rheinisch-Westfälische Technische Hochschule Aachen
Year: 1979 Publisher: Aachen : Institute for semiconductor electronics [Aachen],
Year: 1979 Publisher: Aachen : Institute for semiconductor electronics [Aachen],
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Lithographie --- Congres et conferences --- Lithographie --- Congres et conferences
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