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book (9)

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English (9)

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1999 (3)

1998 (2)

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1996 (2)

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MEMS '99 : twelfth IEEE International conference on micro electro mechanical systems : technical digest : Orlando, Florida, USA, January 17-21, 1999
Author: IEEE.. Workshop on micro electro mechanical systems (12th : 1999 : Orlando)
ISBN: 0780351940 0780351959 0780351967 9780780351943 9780780351950 9780780351967 Year: 1999 Publisher: Piscataway: IEEE,

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Microelectromechanical systems --- Detectors --- Actuators --- Electrical & Computer Engineering --- Electrical Engineering --- Engineering & Applied Sciences --- Microelectromechanical systems - Congresses --- Detectors - Congresses --- Actuators - Congresses

Book

IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996
Authors: IEEE Workshop on Micro Electro Mechanical Systems --- IEEE Robotics and Automation Society
Year: 1996 Publisher: [Place of publication not identified] Institute of Electrical and Electronics Engineers

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Keywords
Electromechanical devices --- Microelectronics --- Detectors --- Actuators --- Congresses

Book

MEMS '99 : Twelfth IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Orlando, Florida, USA, January 17-21, 1999
Authors: IEEE Workshop on Micro Electro Mechanical Systems --- IEEE Robotics and Automation Society
Year: 1999 Publisher: [Place of publication not identified] IEEE

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Microelectromechanical systems --- Detectors --- Actuators

Book

MEMS '99 : Twelfth IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Orlando, Florida, USA, January 17-21, 1999
Authors: IEEE Workshop on Micro Electro Mechanical Systems --- IEEE Robotics and Automation Society
Year: 1999 Publisher: [Place of publication not identified] IEEE

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Microelectromechanical systems --- Detectors --- Actuators --- Electrical & Computer Engineering --- Electrical Engineering --- Engineering & Applied Sciences

Book

IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996
Authors: IEEE Workshop on Micro Electro Mechanical Systems --- IEEE Robotics and Automation Society
Year: 1996 Publisher: [Place of publication not identified] Institute of Electrical and Electronics Engineers

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Keywords
Electromechanical devices --- Microelectronics --- Detectors --- Actuators --- Electrical & Computer Engineering --- Electrical Engineering --- Engineering & Applied Sciences --- Congresses

Book

The Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany
Authors: IEEE Workshop on Micro Electro Mechanical Systems --- American Society of Mechanical Engineers Dynamic Systems and Control Division --- IEEE Robotics and Automation Society
Year: 1998 Publisher: [Place of publication not identified] Institute of Electrical and Electronics Engineers

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Microelectromechanical systems --- Detectors --- Microactuators --- Congresses --- Congresses.

Book

The Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997
Authors: IEEE Workshop on Micro Electro Mechanical Systems --- The American Society of Mechanical Engineers --- American Society of Mechanical Engineers Dynamic Systems and Control Division --- IEEE Robotics and Automation Society
Year: 1997 Publisher: [Place of publication not identified] Institute of Electrical and Electronics Engineers

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Microelectronics --- Microelectromechanical systems --- Detectors --- Actuators

Book

The Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany
Authors: IEEE Workshop on Micro Electro Mechanical Systems --- American Society of Mechanical Engineers Dynamic Systems and Control Division --- IEEE Robotics and Automation Society
Year: 1998 Publisher: [Place of publication not identified] Institute of Electrical and Electronics Engineers

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Microelectromechanical systems --- Detectors --- Microactuators --- Electrical & Computer Engineering --- Electrical Engineering --- Engineering & Applied Sciences --- Congresses

Book

The Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997
Authors: IEEE Workshop on Micro Electro Mechanical Systems --- The American Society of Mechanical Engineers --- American Society of Mechanical Engineers Dynamic Systems and Control Division --- IEEE Robotics and Automation Society
Year: 1997 Publisher: [Place of publication not identified] Institute of Electrical and Electronics Engineers

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Keywords
Microelectronics --- Microelectromechanical systems --- Detectors --- Actuators --- Electrical & Computer Engineering --- Engineering & Applied Sciences --- Electrical Engineering

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