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High power impulse magnetron sputtering : fundamentals, technologies, challenges and applications
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Authors:
Lundin, Daniel
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Minea, Tiberiu
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Gudmundsson, Jón Tómas
ISBN: 9780128124543 0128124547 9780128124550 0128124555 Year: 2020 Publisher: Amsterdam, Netherlands ; Oxford, England ; Cambridge, Massachusetts : Elsevier,
ISBN: 9780128124543 0128124547 9780128124550 0128124555 Year: 2020 Publisher: Amsterdam, Netherlands ; Oxford, England ; Cambridge, Massachusetts : Elsevier,
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Abstract
Keywords
Magnetron sputtering. --- Materials science. --- Material science --- Physical sciences --- Sputtering (Physics)
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