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Integrated circuits --- Metal oxide semiconductors --- Silicon --- Silicon oxide films --- Silicon-on-insulator technology --- CMOS --- halfgeleiderelement --- lithografie --- thermische oxidatie --- vlsi --- SOI devices --- Electric insulators and insulation --- Semiconductors --- Silicium --- Group 14 elements --- Nonmetals --- Unipolar transistors --- Transistors --- Charge coupled devices --- Very large scale integration of circuits --- VLSI circuits --- Very large scale integration. --- Chips (Electronics) --- Circuits, Integrated --- Computer chips --- Microchips --- Electronic circuits --- Microelectronics --- Very large scale integration&delete& --- Design and construction --- Metal oxide semiconductors. --- Silicon oxide films. --- Silicon-on-insulator technology. --- Silicon. --- Very large scale integration --- Design and construction.