Union Catalogue of Belgian Libraries
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Dissertation
Exploration of SAMs (self-assembled monolayers) in advanced Cu interconnects.
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Authors:
Maestre Caro, Arantxa
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Binnemans, Koen.
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Maes, Guido.
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Borghs, Gustaaf
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De Gendt, Stefan.
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et al.
ISBN: 9789086494996 Year: 2012
ISBN: 9789086494996 Year: 2012
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