UniCat-Search

Union Catalogue of Belgian Libraries

English | Nederlands | Français

Feedback

About UniCat

Help

News

Narrow your search

Library

KU Leuven (3)

ULiège (2)

IMEC (1)

Resource type

book (5)

Language

English (5)

Year

From To

2001 (1)

1997 (2)

1996 (2)

Listing 1 - 5 of 5
Sort by

Plasma charging damage.
Author: Cheung, Kin P.
ISBN: 1852331445 Year: 2001 Publisher: London Springer

Abstract | Keywords | Export | Availability | Bookmark

Loading...

Export citation
Choose an application

Reference Manager

EndNote

RefWorks (Direct export to RefWorks)

Bookmark

Abstract

Keywords
Metal oxide semiconductors --- Plasma radiaiton --- Semiconductors --- Defects --- Effect of radiation on

Book

1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA
Authors: Cheung, Kin P --- Gabriel, Calvin T. --- Nakamura, Moritaka --- International Symposium on Plasma Process-Induced Damage --- IEEE Electron Devices Society --- et al.
Year: 1996 Publisher: [Place of publication not identified] Northern California Chapter of the American Vacuum Society

Abstract | Keywords | Export | Availability | Bookmark

Loading...

Export citation
Choose an application

Reference Manager

EndNote

RefWorks (Direct export to RefWorks)

Bookmark

Abstract

Keywords
Semiconductor wafers --- Semiconductors --- Plasma radiation --- Congresses --- Effect of radiation on --- Congresses.

Book

1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Authors: Cheung, Kin P --- Nakamura, Moritaka --- Gabriel, Calvin T. --- International Symposium on Plasma Process-Induced Damage --- American Vacuum Society --- et al.
Year: 1997 Publisher: [Place of publication not identified] Northern California Chapter of the American Vacuum Society

Abstract | Keywords | Export | Availability | Bookmark

Loading...

Export citation
Choose an application

Reference Manager

EndNote

RefWorks (Direct export to RefWorks)

Bookmark

Abstract

Keywords
Semiconductor wafers --- Semiconductors --- Plasma etching --- Defects --- Effect of radiation on --- Congresses.

Book

1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA
Authors: Cheung, Kin P --- Gabriel, Calvin T. --- Nakamura, Moritaka --- International Symposium on Plasma Process-Induced Damage --- IEEE Electron Devices Society --- et al.
Year: 1996 Publisher: [Place of publication not identified] Northern California Chapter of the American Vacuum Society

Abstract | Keywords | Export | Availability | Bookmark

Loading...

Export citation
Choose an application

Reference Manager

EndNote

RefWorks (Direct export to RefWorks)

Bookmark

Abstract

Keywords
Semiconductor wafers --- Semiconductors --- Plasma radiation --- Electrical & Computer Engineering --- Electrical Engineering --- Engineering & Applied Sciences --- Congresses --- Effect of radiation on

Book

1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Authors: Cheung, Kin P --- Nakamura, Moritaka --- Gabriel, Calvin T. --- International Symposium on Plasma Process-Induced Damage --- American Vacuum Society --- et al.
Year: 1997 Publisher: [Place of publication not identified] Northern California Chapter of the American Vacuum Society

Abstract | Keywords | Export | Availability | Bookmark

Loading...

Export citation
Choose an application

Reference Manager

EndNote

RefWorks (Direct export to RefWorks)

Bookmark

Abstract

Keywords
Semiconductor wafers --- Semiconductors --- Plasma etching --- Electrical & Computer Engineering --- Electrical Engineering --- Engineering & Applied Sciences --- Defects --- Effect of radiation on --- Congresses.

Listing 1 - 5 of 5
Sort by