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This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO4-based slurry. The thesis subsequently studies Cu/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research.

Engineering. --- Manufacturing industries. --- Machines. --- Tools. --- Electronics. --- Microelectronics. --- Tribology. --- Corrosion and anti-corrosives. --- Coatings. --- Manufacturing, Machines, Tools. --- Tribology, Corrosion and Coatings. --- Electronics and Microelectronics, Instrumentation. --- Chemical mechanical planarization. --- Chemical mechanical polishing --- Grinding and polishing --- Manufactures. --- Chemistry, inorganic. --- Manufacturing, Machines, Tools, Processes. --- Inorganic chemistry --- Chemistry --- Inorganic compounds --- Electrical engineering --- Physical sciences --- Manufactured goods --- Manufactured products --- Products --- Products, Manufactured --- Commercial products --- Manufacturing industries --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Surface coatings --- Materials --- Surfaces (Technology) --- Coating processes --- Thin films --- Anti-corrosive paint --- Atmospheric corrosion --- Metal corrosion --- Metals --- Rust --- Rustless coatings --- Chemical inhibitors --- Chemistry, Technical --- Fouling --- Weathering --- Paint --- Protective coatings --- Waterproofing --- Friction --- Corrosion --- Deterioration --- Surfaces

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This book describes the algorithms, validation and preliminary analysis of the Global LAnd Surface Satellite (GLASS) products, a long-term, high-quality dataset that is now freely available worldwide to government organizations and agencies, scientific research institutions, students and members of the general public. The GLASS products include leaf area index, broadband albedo, broadband emissivity, downward shortwave radiation and photosynthetically active radiation. The first three GLASS products cover 1981 to 2012 with 1km and 5km spatial resolutions and 8-day temporal resolution, and the last two GLASS products span 2008 to 2010 with 3-hour temporal resolution and 5km spatial resolution. These GLASS products are unique. The first three are spatially continuous and cover the longest period of time among all current similar satellite products. The other two products are the highest spatial-resolution global radiation products from satellite observations that are currently available. These products can be downloaded from Beijing Normal University at  http://glass-product.bnu.edu.cn/ and the University of Maryland Global Land Cover Facility at http://www.glcf.umd.edu/ The GLASS products  are the outcome of a key research project entitled “Generation & Applications of Global Products of Essential Land Variables”, supported by funding from the High-Tech Research and Development Program of China and involving dozens of institutions and nearly one hundred scientists and researchers. Following an introduction, the book contains five chapters corresponding to these five GLASS products: background, algorithm, quality control and validation, preliminary analysis and applications. It discusses the long-term environmental changes detected from the GLASS products and other data sources at both global and local scales and also provides detailed analysis of regional hotspots where environmental changes are mainly associated with climate change, drought, land-atmosphere interactions, and human activities.   The book is based primarily on a set of published journal papers about these five GLASS products and includes updated information. Since these products have now begun to be widely used, this book is an essential reference document. It is also a very helpful resource to anyone interested in satellite remote sensing and its applications.      .

Space research --- Geodesy. Cartography --- Environmental protection. Environmental technology --- Physical geography --- Geography --- fotogrammetrie --- milieukunde --- remote sensing --- geografie --- fysische geografie --- sensoren --- klimaatverandering