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Collection of selected, peer reviewed papers from the5th International Conference on Asian Society for Precision Engineering and Nanotechnology (ASPEN 2013), November 12-15, 2013, Taipei, Taiwan. The 124 paper are grouped as follows: Precision Metrology, Precision Machining, Optical Measurement, Manufacturing Systems and Machine Tools, Motion Control/ Polishing and Grinding, Advanced Moulding and Precision Forming/ Advanced Technologies, Non-Conventional Machining, Precision Machine Design & Mechatronics, High Precision Mechatronics / Robotics, Others

Nanotechnology --- Micromachining