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The thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed. .
Physics. --- Spectroscopy. --- Microscopy. --- Nanotechnology. --- Materials science. --- Spectroscopy and Microscopy. --- Nanotechnology and Microengineering. --- Characterization and Evaluation of Materials. --- Thin films. --- Electronic apparatus and appliances. --- Metrology. --- Electronic devices --- Electronics --- Films, Thin --- Solid film --- Apparatus and appliances --- Physical instruments --- Scientific apparatus and instruments --- Electronic instruments --- Science --- Measurement --- Weights and measures --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Engineering. --- Surfaces (Physics). --- Physics --- Surface chemistry --- Construction --- Industrial arts --- Technology --- Material science --- Physical sciences --- Molecular technology --- Nanoscale technology --- High technology --- Analysis, Microscopic --- Light microscopy --- Micrographic analysis --- Microscope and microscopy --- Microscopic analysis --- Optical microscopy --- Optics --- Analysis, Spectrum --- Spectra --- Spectrochemical analysis --- Spectrochemistry --- Spectrometry --- Spectroscopy --- Chemistry, Analytic --- Interferometry --- Radiation --- Wave-motion, Theory of --- Absorption spectra --- Light --- Spectroscope --- Qualitative --- Analytical chemistry
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The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Atomic force microscopy. --- Surfaces (Physics). --- Electronics. --- Optical materials. --- Nanotechnology. --- Spectroscopy and Microscopy. --- Characterization and Evaluation of Materials. --- Electronics and Microelectronics, Instrumentation. --- Optical and Electronic Materials. --- Nanoscale Science and Technology. --- Molecular technology --- Nanoscale technology --- High technology --- Optics --- Materials --- Electrical engineering --- Physical sciences --- Physics --- Surface chemistry --- Surfaces (Technology) --- Spectroscopy. --- Microscopy. --- Materials science. --- Microelectronics. --- Electronic materials. --- Nanoscale science. --- Nanoscience. --- Nanostructures. --- Nano science --- Nanoscale science --- Nanosciences --- Science --- Nanoscience --- Electronic materials --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Material science --- Analysis, Microscopic --- Light microscopy --- Micrographic analysis --- Microscope and microscopy --- Microscopic analysis --- Optical microscopy --- Analysis, Spectrum --- Spectra --- Spectrochemical analysis --- Spectrochemistry --- Spectrometry --- Spectroscopy --- Chemistry, Analytic --- Interferometry --- Radiation --- Wave-motion, Theory of --- Absorption spectra --- Light --- Spectroscope --- Qualitative --- Analytical chemistry
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The thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed. .
Optics. Quantum optics --- Physics --- Chemical structure --- Theoretical spectroscopy. Spectroscopic techniques --- Materials sciences --- Electrical engineering --- Biotechnology --- materiaalkennis --- nanotechniek --- spectroscopie --- biotechnologie --- microscopie --- fysica
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