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Dissertation
Dopant imaging and profiling of wide bandgap semiconductor devices.
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Author: Buzzo, Marco
ISBN: 3866281242 Year: 2007 Publisher: Konstanz Hartung-Gorre
ISBN: 3866281242 Year: 2007 Publisher: Konstanz Hartung-Gorre
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Abstract
Keywords
Semiconductor doping --- Silicon carbide --- Wide gap semiconductors
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