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This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.

Industrial hygiene --- Semiconductor industry --- Employees --- Health of workers --- Hygiene, Industrial --- Industrial health engineering --- Occupational health and safety --- Occupational safety and health --- Occupations --- Work environment --- Environmental health --- Industrial management --- Medicine, Industrial --- Electronic industries --- Employees&delete& --- Health and hygiene --- Safety measures --- Health aspects --- Engineering --- General and Others --- Industrial hygiene. --- Safety measures. --- Health and hygiene.

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Chemicals --- Safety measures --- Handbooks, manuals, etc