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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Technology - General --- Engineering & Applied Sciences --- Nanoelectromechanical systems. --- Nano-electro-mechanical systems --- Nanoelectromechanical devices --- Nanomechanical devices --- Nanomechanical machines --- Nanomechanical systems --- Nanometer scale devices --- Nanoscale devices --- Nanoscale electronic devices --- Nanostructured devices --- NEMS (Nanotechnology) --- Nanoelectronics --- Nanostructures --- Engineering. --- Electronics. --- Engineering design. --- Nanotechnology and Microengineering. --- Electronics and Microelectronics, Instrumentation. --- Control, Robotics, Mechatronics. --- Engineering Design. --- Design, Engineering --- Engineering --- Industrial design --- Strains and stresses --- Electrical engineering --- Physical sciences --- Construction --- Industrial arts --- Technology --- Design --- Nanotechnology. --- Microelectronics. --- Control engineering. --- Robotics. --- Mechatronics. --- Mechanical engineering --- Microelectronics --- Microelectromechanical systems --- Automation --- Machine theory --- Control engineering --- Control equipment --- Control theory --- Engineering instruments --- Programmable controllers --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Molecular technology --- Nanoscale technology --- High technology