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This dissertation by Karl Rönnby investigates the atomic layer deposition (ALD) and chemical vapor deposition (CVD) techniques for producing thin films of Group 13 nitrides, such as aluminum nitride (AlN), gallium nitride (GaN), and indium nitride (InN). The research focuses on the computational chemistry modeling of the gas phase decomposition and surface adsorption processes of various precursors. The study examines the reactivity and efficiency of these processes, highlighting the challenges and potential alternatives for sustainable and large-scale production of these materials for semiconductor applications.

Atomic layer deposition. --- Chemical vapor deposition.

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This dissertation by Tun-Wei Hsu focuses on understanding and controlling the influence of ions in plasma on film growth during thin film deposition processes using physical vapor deposition (PVD) techniques. It examines magnetron sputtering and cathodic arc evaporation, emphasizing low-mass ion subplantation and heavy-mass ion irradiation. The research explores the correlation between nitrogen pressure and plasma properties, the effect of ionized species on film properties, and the use of synchronized substrate bias to enhance coating performance. The study provides insights into advanced coating techniques to improve tool durability and performance in cutting applications.

Physical vapor deposition. --- Magnetron sputtering.

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Volcanoes. --- Volcans. --- Sedimentation and deposition. --- Sédimentation (géologie)

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Trees --- Atmospheric deposition. --- Nitrogen cycle. --- Forests and forestry. --- Forest declines. --- Effect of atmospheric nitrogen dioxide on.

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This two-volume set provides an extensive review of the abundant past and recent literature on the atmospheric chemistry in the Mediterranean region. ­The books document the experience gained on the atmospheric composition over the Mediterranean basin and close areas after almost six decades of studies, starting from early studies of radioactive aerosol fallouts and intense desert dust events in the 1960s, aerosol samples collected during oceanographic cruises in the early 1980s and including discoveries from subsequent surface monitoring stations, intensive campaigns, satellite climatologies, laboratory studies, as well as chemistry-transport and climate models. Through ten thematic sections, the authors examine the sources and fates of atmospheric pollutants over the Mediterranean basin and what we know about their major impacts on air quality and health, on the radiative budget and climate, on marine chemistry and biogeochemistry. ­ This overview not only considers the full cycle of both aerosol and reactive gases including emissions, transport, transformation, and sinks, but also addresses the main impacts of the regional atmospheric chemistry.­ The volumes are an initiative from the ending ChArMEx project that has federated many studies on those topics in the past decade, and update the scientific knowledge by integrating the ChArMEx and non-ChArMEx literature. The books are contributed by a large pool of well-known authors from the respective fields, mainly from France and Greece, but also from fourteen other countries. All chapters have been peer-reviewed by international scientific experts in the corresponding domains. Volume 1 provides background information on the Mediterranean atmosphere and focuses on the synoptic and dynamic conditions affecting pollutant concentrations over the Mediterranean basin, aerosol concentrations and variability, and reactive gas concentrations and variability. ­ The targeted audience is the academic community working on atmospheric chemistry and its impacts on climate, air quality and marine biogeochemistry, especially teams having a special interest in the Mediterranean region, which includes many countries and institutes worldwide.

Atmospheric chemistry. --- Atmospheric deposition. --- Air pollutant deposition --- Atmospheric fallout --- Atmospheric pollutant deposition --- Deposition of air pollutants --- Deposition of atmospheric pollutants --- Fallout, Atmospheric --- Sedimentation and deposition --- Air --- Atmospheric science --- Chemistry, Physical and theoretical --- Pollution --- Environmental chemistry. --- Pollution. --- Physical geography. --- Environment. --- Environmental Chemistry. --- Earth System Sciences. --- Environmental Sciences. --- Balance of nature --- Biology --- Bionomics --- Ecological processes --- Ecological science --- Ecological sciences --- Environment --- Environmental biology --- Oecology --- Environmental sciences --- Population biology --- Geography --- Chemical pollution --- Chemicals --- Contamination of environment --- Environmental pollution --- Contamination (Technology) --- Asbestos abatement --- Bioremediation --- Environmental engineering --- Environmental quality --- Factory and trade waste --- Hazardous waste site remediation --- Hazardous wastes --- In situ remediation --- Lead abatement --- Pollutants --- Refuse and refuse disposal --- Chemistry, Environmental --- Chemistry --- Ecology --- Environmental aspects