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Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

encapsulation --- n/a --- NEM memory switch --- magnetotransistor --- gas sensor --- nano-system array --- metal oxide (MOX) sensor --- capacitive pressure sensor --- real-time temperature compensation loop --- mechanical relays --- single-crystal silicon (SC-Si) --- MEMS relays --- MEMS --- oscillator --- micro-electro-mechanical system (MEMS) --- uncooled IR-bolometer --- microelectromechanical systems --- microbolometer --- programmable sustaining amplifier --- micro sensor --- CMOS-MEMS --- pierce oscillator --- MEMS resonators --- micro/nanoelectromechanical systems (MEMS/NEMS) --- resonator --- microhotplate --- NEMS --- application-specific integrated circuit (ASIC) --- MEMS modelling --- magnetic field --- chopper instrumentation amplifier --- microresonators --- interface circuit --- Hall effect --- thermal detector --- temperature sensor --- infrared sensor --- CMOS–NEMS --- CMOS --- atomic force microscope --- MEMS switches --- stent --- micro-electro-mechanical systems (MEMS) sensors --- nano resonator --- silicon-on-insulator (SOI) --- MEMS-ASIC integration --- Sigma-Delta --- MEMS characterization --- high-Q capacitive accelerometer --- mass sensors --- M3D --- CMOS-NEMS

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Micro manufacturing involves dealing with the fabrication of structures in the size range of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales—below 100 nm. A strict borderline between micro and nano manufacturing can hardly be drawn, such that both domains are treated as complementary and mutually beneficial within a closely interconnected scientific community. Both micro and nano manufacturing can be considered as important enablers for high-end products. This Special Issue of Applied Sciences is dedicated to recent advances in research and development within the field of micro and nano manufacturing. The included papers report recent findings and advances in manufacturing technologies for producing products with micro and nano scale features and structures as well as applications underpinned by the advances in these technologies.

path adaptability --- uncertainty quantification --- hardening --- empirical mode decomposition --- microlens array mold --- gaussian process modeling --- multi-objective particle swarm optimization --- micro reactors --- XRD --- surface roughness --- water impermeability tests --- nanocone array --- additive manufacturing --- antireflection nanostructure --- ultraprecision machining --- Surface-enhanced Raman scattering --- micro stereolithography --- optical encoder --- micro assembly --- micro-optics --- nanosphere array --- micro-assembly --- injection molding --- Portland limestone ternary fiber–cement nanohybrids --- hot embossing --- deterministic polishing --- micro-lens array --- process parameter optimization --- TGA/dTG --- intrinsic mode function --- micro factories --- three-dimensional elliptical vibration cutting --- flow control --- micro-EDM molds --- Image segmentation --- micro actuators --- culture dish adapter --- flexural strength --- SERS --- low PC clinker --- MIP --- selective laser melting --- micro sensors --- friction coefficient --- design of experiments --- Ti6Al4V --- micro-spring --- contactless embossing --- micro and nano additive manufacturing --- Taguchi’s method --- nanoimprinting --- perfusion culture --- micro and nano manufacturing --- data structure --- fluid jet polishing --- nitrogen supersaturation --- spatial uncertainty modeling --- active alignment --- variable pitch path --- conceptual design --- feature extraction --- blaze --- micro-nozzle --- product development --- opto-ASIC --- wafer-level optics --- residual error optimization --- stiffness control --- surface engineering and interface nanotechnology --- design for manufacturability --- anodic aluminum oxide --- plasma nitriding --- micro 3D printing --- hydrophobicity --- grating --- micro-fluidics --- closed environment --- chatter identification --- small recess structure