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This dissertation by Martin Mickan explores the deposition of aluminum-doped zinc oxide (AZO) films using high power impulse magnetron sputtering (HiPIMS). It examines the improvement of film homogeneity and electrical properties, addressing challenges such as oxygen ion bombardment and stability in humid environments. The study demonstrates that HiPIMS can enhance the crystalline quality and reduce defect formation without the need for high substrate temperatures, making it suitable for flexible substrates. The work is intended for researchers in materials science and engineering, focusing on transparent conducting oxides for applications like photovoltaics and flat panel displays.

Magnetron sputtering. --- Transparent semiconductors.